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Daniel Arthur Brown

Lam Research

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Publication

Featured researches published by Daniel Arthur Brown.

Archive | 2010

Replaceable upper chamber parts of plasma processing apparatus

Daniel Arthur Brown; Jeffrey A. Bogart; Ian J. Kenworthy

Archive | 2009

Plasma processing chamber with guard ring for upper electrode assembly

Dean J. Larson; Daniel Arthur Brown; Saurabh Ullal

Archive | 2007

Quartz guard ring centering features

Dean J. Larson; Daniel Arthur Brown; Keith Comendant; Victor Wang

Archive | 2007

Quartz guard ring

Dean J. Larson; Daniel Arthur Brown; Saurabh Ullal

Archive | 2012

Compression member for use in showerhead electrode assembly

Darrell Ehrlich; Daniel Arthur Brown; Ian J. Kenworthy

Archive | 2016

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY

Daniel Arthur Brown; John Patrick Holland; Michael C. Kellogg; James E. Tappan; Jerrel K. Antolik; Ian J. Kenworthy; Theo Panagopoulos; Zhigang Chen

Archive | 2015

Plasma Processing Devices Having Multi-Port Valve Assemblies

Michael C. Kellogg; Daniel Arthur Brown; Leonard J. Sharpless; Allan Ronne

Archive | 2013

PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY

Michael C. Kellogg; Daniel Arthur Brown

Archive | 2013

Replaceable upper chamber part of plasma reaction chamber

Daniel Arthur Brown; Jeff A Bogart; Ian J. Kenworthy

Archive | 2012

ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING

Ian J. Kenworthy; Daniel Arthur Brown; Cliff E. La Croix; Josh A. Cormier

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Ian J. Kenworthy

Lam Research

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Dean J. Larson

Lam Research

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Michael C. Kellogg

Lam Research

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Saurabh Ullal

Lam Research

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Allan Ronne

Lam Research

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Darrell Ehrlich

Lam Research

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James E. Tappan

Lam Research

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Jeffrey A. Bogart

Lam Research

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Jerrel K. Antolik

Lam Research

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John Patrick Holland

Lam Research

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