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Shuang Meng

Micron Technology

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Publication

Featured researches published by Shuang Meng.

Archive | 2007

Pitch reduced patterns relative to photolithography features

Luan Tran; William T. Rericha; John K. Lee; Ramakanth Alapati; Sheron Honarkhah; Shuang Meng; Puneet Sharma; Jingyi Bai; Zhiping Yin; Paul A. Morgan; Mirzafer Abatchev; Gurtej S. Sandhu; D. Mark Durcan

Archive | 2004

Enhanced atomic layer deposition

Shuang Meng; Garo J. Derderian; Gurtej S. Sandhu

Archive | 2005

Multiple deposition for integration of spacers in pitch multiplication process

Jingyi Bai; Gurtej S. Sandhu; Shuang Meng

Archive | 2003

Insitu post atomic layer deposition destruction of active species

Demetrius Sarigiannis; Shuang Meng; Garo J. Derderian

Archive | 2006

Atomic layer deposition method of depositing an oxide on a substrate

Garo J. Derderian; Shuang Meng; Danny Dynka

Archive | 2005

Atomic layer deposition method of forming an oxide comprising layer on a substrate

Garo J. Derderian; Demetrius Sarigiannis; Shuang Meng

Archive | 2006

Method to deposit conformal low temperature SiO2

John Smythe; Gurtej S. Sandhu; Brian J. Coppa; Shyam Surthi; Shuang Meng

Archive | 2003

Systems and methods for depositing material onto microfeature workpieces in reaction chambers

Demetrius Sarigiannis; Shuang Meng; Garo J. Derderian

Archive | 2005

Methods of fabricating interconnects for semiconductor components

Kyle K. Kirby; Shuang Meng; Garo J. Derderian

Archive | 2004

Methods of fabricating interconnects for semiconductor components including plating solder-wetting material and solder filling

Kyle K. Kirby; Shuang Meng; Garo J. Derderian

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Collaboration

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Garo J. Derderian

Micron Technology

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Gurtej S. Sandhu

Micron Technology

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Jingyi Bai

Micron Technology

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John K. Lee

Micron Technology

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Kyle K. Kirby

Micron Technology

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Luan Tran

Micron Technology

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Mirzafer Abatchev

Micron Technology

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Paul A. Morgan

Micron Technology

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Puneet Sharma

Micron Technology

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Ramakanth Alapati

Intel

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