Shuang Meng

Pitch reduced patterns relative to photolithography features

Enhanced atomic layer deposition

Multiple deposition for integration of spacers in pitch multiplication process

Insitu post atomic layer deposition destruction of active species

Atomic layer deposition method of depositing an oxide on a substrate

Atomic layer deposition method of forming an oxide comprising layer on a substrate

Method to deposit conformal low temperature SiO2

Systems and methods for depositing material onto microfeature workpieces in reaction chambers

Methods of fabricating interconnects for semiconductor components

Methods of fabricating interconnects for semiconductor components including plating solder-wetting material and solder filling