Detlef Weber

Method of insulating interconnects, and memory cell array with insulated interconnects

Manufacturing method for an integrated semiconductor contact structure having an improved aluminum fill

Metallization arrangement for semiconductor structure and corresponding fabrication method

Method of fabricating an integrated memory device

Compact semiconductor structure

Method for Manufacturing an Integrated Circuit Including a Lateral Trench Transistor and a Logic Circuit Element

Integrated circuit and method of manufacturing the same, and semiconductor device

SEMICONDUCTOR DEVICE COMPRISING A TRANSISTOR CELL INCLUDING A SOURCE CONTACT IN A TRENCH, METHOD FOR MANUFACTURING THE SEMICONDUCTOR DEVICE AND INTEGRATED CIRCUIT

A semiconductor device having a transistor cell that includes a source contact in a trench method of manufacturing the semiconductor device and integrated circuit

Herstellungsverfahren für eine integrierte Halbleiterkontaktstruktur mit einer verbesserten Aluminiumfüllung Manufacturing method of a semiconductor integrated contact structure having an improved aluminum filling