Dieter Schmerek | Researchain

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Featured researches published by Dieter Schmerek.

Archive | 2004

Microlithographic projection exposure system, and method for introducing an immersion liquid into an immersion chamber

Bernhard Gellrich; Gerd Reisinger; Dieter Schmerek; Jens Kugler

Archive | 2005

Optical element unit for exposure processes

Bernhard Gellrich; Jens Kugler; Guido Limbach; Julian Kaller; Hans Jürgen Scherle; Dieter Schmerek; Detlev Müller; Thomas Schletterer

Archive | 2001

System for flushing at least one internal space of an objective

Joachim Schroeder; Gerald Richter; Dieter Schmerek; Uwe Schubert; Maria Johanna Agnes Rubingh; Willem van Schaik; Siebe Landheer

Archive | 2004

Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion space

Bernhard Gellrich; Gerd Reisinger; Dieter Schmerek; Jens Kugler

Archive | 2007

Optical system of an illumination device of a projection exposure apparatus

Karl-Heinz Schuster; Juergen Hartmaier; Manfred Maul; Dieter Schmerek; Detlev Mueller; Otto Hahnemann; Frank Marianek; Gundula Weiss; Damian Fiolka

Archive | 2002

Process and device for cleaning the external surfaces of lithographic objectives of microlithographic projection units rinses the surfaces with cleaning fluid

Frank Marianek; Ralf Scharnweber; Dieter Schmerek; Oliver Wolf

Archive | 2001

System for cleaning at least one internal space of objective lens with gas

Siebe Landheer; Gerald Richter; Maria Johanna Agnes Rubingh; Willem van Schaik; Dieter Schmerek; Joachim Schroeder; Uwe Schubert; ファンスハイクウィレム; シューベルトウヴェ; リヒターゲラルド; ラントヒールシーベ; シュメレクディーター; ヨハンナアグネスルビンヒマリア; シュローダーヨアヒム

Archive | 2007