Jens Kugler | Researchain

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Featured researches published by Jens Kugler.

Archive | 2004

Holding Device for an Optical Element in an Objective

Bernhard Gellrich; Andreas Wurmbrand; Jens Kugler; Armin Schoeppach; Christian Zengerling; Stephane Bruynooghe

Archive | 2005

Exposure apparatus and measuring device for a projection lens

Albrecht Ehrmann; Ulrich Wegmann; Rainer Hoch; Joerg Mallmann; Karl-Heinz Schuster; Ulrich Loering; Toralf Gruner; Bernhard Kneer; Bernhard Geuppert; Franz Sorg; Jens Kugler; Norbert Wabra

Archive | 2005

Projection lens and microlithographic projection exposure apparatus

Martin Brunotte; Jürgen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2004

Support device for positioning an optical element

Jens Kugler; Ulrich Weber; Sabine Hafenrichter

Archive | 2002

Microlithographic projection illumination system

Martin Brunotte; Juergen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2004

Replacement apparatus for an optical element

Jens Kugler; Franz Sorg; Andreas Wurmbrand; Thomas Schletterer; Thomas Ittner

Archive | 2009

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

Guido Limbach; Franz Sorg; Armin Schoeppach; Ulrich Weber; Ulrich Loering; Dirk Hellweg; Peter Meyer; Stefan Xalter; Jens Kugler; Bernhard Gellrich; Stefan Hembacher; Bernhard Geuppert; Aksel Goehnermeier

Archive | 2013