Wolfram Karcher

Method for increasing the capacitance in a storage trench

Method for increasing the capacitance in a storage trench and trench capacitor having increased capacitance

Memory with trench capacitor and selection transistor and method for fabricating it

Trench capacitor and method for fabricating the same

Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it

Trench capacitor used in the production of integrated circuits or chips comprises a trench formed in a substrate, an insulating collar, a trenched sink, a dielectric layer and a conducting trench filling

Method for fabricating epitaxy layer

Production of epitaxial layer for dynamic random access memory comprises preparing substrate having single crystalline and insulated regions, growing epitaxial layer on single crystalline region and partially removing epitaxial layer

Backing Plate for a Sputter Target, Sputter Target, and Sputter Device

Semiconductor memory cell comprising a trench capacitor and a select transistor and a method for the production thereof