Dirk Schumann
Siemens
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Dirk Schumann.
IEEE Transactions on Nanotechnology | 2002
Bernhard Sell; Dirk Schumann; Wolfgang H. Krautschneider
As new gate materials become increasingly interesting in conjunction with tunnel oxides, a fast and reliable interface characterization technique becomes indispensable. Fast turnaround times require a method which can be applied to simple test structures like planar capacitors. For the first time, we demonstrate an automatic extraction of physical oxide thickness and flatband potential from capacitance-voltage measurements which includes quantum confinement effects and Fermi-Dirac statistics. Automatic extraction is necessary for uniformity analysis across a whole wafer. New gate materials are typically binary or ternary alloys where the interface to the gate dielectric is very sensitive to deposition parameters. Such systems are likely to show higher nonuniformities than polysilicon electrodes. An example is presented where polysilicon gates exhibit a uniformity in flatband potential within a wafer of less than /spl plusmn/15 mV while a thickness variation of 0.1 nm has been observed.
european solid-state device research conference | 1997
Dirk Schumann; R. Krieg; H. Schaefer; Udo Schwalke
nMOSFETs with elevated S/D structures were fabricated by selective epitaxial growth of in-situ doped S/D regions. Variation of the total thermal budget allowed the optimization of outdiffusion from the epi-Si with respect to the realization of shallow junctions. For all process conditions investigated the Reverse Short Channel Effect (RSCE) was completely suppressed indicating that the RSCE observed for conventional processed nMOSFETs has to be attributed to S/D implantation. The process presented allows a realization of typical advantages for elevated S/D structures with an optimized Vth roll-off.
Archive | 2001
Annalisa Cappellani; Dirk Schumann; Josef Willer
Archive | 2000
Bernhard Sell; Josef Willer; Dirk Schumann
Archive | 2003
Bernhard Sell; Annette Sänger; Dirk Schumann
Archive | 2004
Albert Birner; Steffen Breuer; Matthias Goldbach; Joern Luetzen; Dirk Schumann
Archive | 2003
Bernhard Sell; Annette Sänger; Dirk Schumann
Archive | 2000
Ernst Huber; Reinhard Fleisner; Dirk Schumann
Archive | 2006
Günter Jaritz; Dirk Schumann
Archive | 2003
Reinhard Fleissner; Ernst Huber; Dirk Schumann