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Tuochuan Huang

Lam Research

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Publication

Featured researches published by Tuochuan Huang.

Archive | 2005

Methods for wet cleaning quartz surfaces of components for plasma processing chambers

Hong Shih; Tuochuan Huang; Duane Outka; Jack Kuo; Shenjian Liu; Bruno Morel; Anthony Chen

Archive | 2004

WET CLEANING OF ELECTROSTATIC CHUCKS

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Archive | 2005

Methods for silicon electrode assembly etch rate and etch uniformity recovery

Tuochuan Huang; Daxing Ren; Hong Shih; Catherine Zhou; Chun Yan; Enrico Magni; Bi Ming Yen; Jerome S. Hubacek; Dae J. Lim; Dougyong Sung

Archive | 2015

System and method for performing hot water seal on electrostatic chuck

Hong Shih; Tuochuan Huang; David Schaefer; Ambarish Chhatre; John Daugherty; MingHang Wu; Clifford La Croix

Archive | 2011

Extending storage time of removed plasma chamber components prior to cleaning thereof

Hong Shih; Qian Fu; Tuochuan Huang; Raphael Casaes; Duane Outka

Archive | 2011

Method of cleaning aluminum plasma chamber parts

Hong Shih; John Daugherty; Dean J. Larson; Tuochuan Huang; Armen Avoyan; Jeremy Chang; Sivakami Ramanathan; Robert Anderson; Yan Fang; Duane Outka; Paul Mulgrew

Archive | 2012

SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK

Hong Shih; Saurabh Ullal; Tuochuan Huang; Yan Fang; Jon McChesney

Archive | 2012

Method of removing damaged epoxy from electrostatic chuck

Hong Shih; Tuochuan Huang; Yan Fang; Cliff LaCroix; Neal Newton; Rish Chhatre

Archive | 2014

Method of wet cleaning aluminum chamber parts

Hong Shih; Fan-Cheung Sze; Brian Mcmillin; John Daugherty; Yan Fang; Duane Outka; Tuochuan Huang; Sivakami Ramanathan

Archive | 2012

Système et procédé de réaliser un joint à eau chaude sur un dispositif de fixation électrostatique

Hong Shih; Tuochuan Huang; David Schaefer; Ambarish Chhatre; John Daugherty; Ryan Wu; Croix Cliff La

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Hong Shih

Lam Research

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Bruno Morel

Lam Research

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Catherine Zhou

Lam Research

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Duane Outka

Lam Research

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John Daugherty

Lam Research

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Yan Fang

Lam Research

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Armen Avoyan

Lam Research

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Brian Mcmillin

Lam Research

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Paul Mulgrew

Lam Research

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Ambarish Chhatre

Lam Research

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