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Dive into the research topics where Eberhard Kühn is active.

Publication


Featured researches published by Eberhard Kühn.


Archive | 2002

Process for sidewall amplification of resist structures and for the production of structures having reduced structure size

Jörg Rottstegge; Eberhard Kühn; Waltraud Herbst; Christian Eschbaumer; Christoph Hohle; Gertrud Falk; Michael Sebald


Archive | 1980

Heat resistant positive resists containing polyoxazoles

Hellmut Ahne; Eberhard Kühn; Roland Rubner


Archive | 1982

Method for the preparation of heat-resistant relief structures using positive resists

Hellmut Ahne; Eberhard Kühn; Roland Rubner


Archive | 1980

Method for the preparation of highly heat-resistant relief structures and the use thereof

Hellmut Ahne; Eberhard Kühn; Roland Rubner; Erwin Schmidt


Archive | 1980

Method for the preparation of relief structures by phototechniques

Roland Rubner; Eberhard Kühn; Hellmut Ahne


Archive | 1981

Radiation-reactive precursor stages of highly heat-resistant polymers

Hellmut Ahne; Eberhard Kühn; Roland Rubner


Archive | 1994

Negative resists with high thermal stability comprising end capped polybenzoxazole and bisazide

Albert Hammerschmidt; Eberhard Kühn; Erwin Schmidt


Archive | 1980

Heat-resistent positive photoresists and process for the preparation of heat-resistent relief structures

Hellmut Ahne; Roland Rubner; Eberhard Kühn


Archive | 1980

Polyimide, polyisoindoloquinazoline dione, polyoxazine dione and polyquinazoline dione precursor stages and the manufacture

Hellmut Ahne; Eberhard Kühn; Roland Rubner


Archive | 1985

Method for the preparation of polyimide and polyisoindoloquinazoline dione precursors

Hellmut Ahne; Eberhard Kühn

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