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Eberhard Kühn

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Publication

Featured researches published by Eberhard Kühn.

Archive | 2002

Process for sidewall amplification of resist structures and for the production of structures having reduced structure size

Jörg Rottstegge; Eberhard Kühn; Waltraud Herbst; Christian Eschbaumer; Christoph Hohle; Gertrud Falk; Michael Sebald

Archive | 1980

Heat resistant positive resists containing polyoxazoles

Hellmut Ahne; Eberhard Kühn; Roland Rubner

Archive | 1982

Method for the preparation of heat-resistant relief structures using positive resists

Hellmut Ahne; Eberhard Kühn; Roland Rubner

Archive | 1980

Method for the preparation of highly heat-resistant relief structures and the use thereof

Hellmut Ahne; Eberhard Kühn; Roland Rubner; Erwin Schmidt

Archive | 1980

Method for the preparation of relief structures by phototechniques

Roland Rubner; Eberhard Kühn; Hellmut Ahne

Archive | 1981

Radiation-reactive precursor stages of highly heat-resistant polymers

Hellmut Ahne; Eberhard Kühn; Roland Rubner

Archive | 1994

Negative resists with high thermal stability comprising end capped polybenzoxazole and bisazide

Albert Hammerschmidt; Eberhard Kühn; Erwin Schmidt

Archive | 1980

Heat-resistent positive photoresists and process for the preparation of heat-resistent relief structures

Hellmut Ahne; Roland Rubner; Eberhard Kühn

Archive | 1980

Polyimide, polyisoindoloquinazoline dione, polyoxazine dione and polyquinazoline dione precursor stages and the manufacture

Hellmut Ahne; Eberhard Kühn; Roland Rubner

Archive | 1985

Method for the preparation of polyimide and polyisoindoloquinazoline dione precursors

Hellmut Ahne; Eberhard Kühn

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Collaboration

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Hellmut Ahne

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Roland Rubner

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Michael Sebald

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Jörg Rottstegge

Infineon Technologies

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Gertrud Falk

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Erwin Schmidt

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Christian Eschbaumer

Infineon Technologies

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Waltraud Herbst

Infineon Technologies

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Albert Hammerschmidt

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Christoph Hohle

Infineon Technologies

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