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Edward Augustyniak

Keil

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Publication

Featured researches published by Edward Augustyniak.

Archive | 2011

Variable-Density Plasma Processing of Semiconductor Substrates

Kevin Jennings; Mohamed Sabri; Edward Augustyniak; Sunil Kapoor; Douglas Keil

Archive | 2012

Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region

Chunguang Xia; Ramesh Chandrasekharan; Douglas Keil; Edward Augustyniak; Karl Leeser

Archive | 2011

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER

Douglas Keil; Edward Augustyniak; Karl Leeser; Mohamed Sabri

Archive | 2008

Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source

Sunil Kapoor; Edward Augustyniak

Archive | 2013

Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor

Mohamed Sabri; Edward Augustyniak; Douglas Keil; Ramkishan Rao Lingampalli; Karl Leeser; Cody Barnett

Archive | 2017

Systems And Methods For Using Electrical Asymmetry Effect To Control Plasma Process Space

Douglas Keil; Edward Augustyniak; Yukinori Sakiyama; Yaswanth Rangineni; Adrien Lavoie; Karl Leeser; Ishtak Karim; Chunhai Ji

Archive | 2017

Systems and methods for controlling plasma instability by frequency modulation of a radio-frequency power supply

Yaswanth Rangineni; Karl Leeser; Adrien Lavoie; Ishtak Karim; Yukinori Sakiyama; Edward Augustyniak; Ramesh Chandrasekharan; Douglas Keil

Bulletin of the American Physical Society | 2016

A Study of Impedance Relationships in Dual Frequency PECVD Process Plasma

Douglas Keil; Edward Augustyniak; Yukinori Sakiyama

Bulletin of the American Physical Society | 2015

A Study of Current and Voltage Relationships in a PECVD Process Plasma

Douglas Keil; Edward Augustyniak; Yukinori Sakiyama

Archive | 2014

SUPPRESSION OF PARASITIC GROWTH IN SUBSTRATE PROCESSING SYSTEM BY SUPPRESSING PRECURSOR FLOW AND PLASMA IN OUTSIDE OF SUBSTRATE AREA

Chunguang Xia; Ramesh Chandrasekharan; Douglas Kyle; Edward Augustyniak; Karl Leeser

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Douglas Keil

Lam Research

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Karl Leeser

Lam Research

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Yukinori Sakiyama

University of California

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Federico Galli

University of Minnesota

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Ramesh Chandrasekharan

Lam Research

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Adrien Lavoie

Lam Research

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Chunguang Xia

Lam Research

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Ishtak Karim

Lam Research

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Yaswanth Rangineni

Lam Research

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Chunhai Ji

Lam Research

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