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Ishtak Karim

Lam Research

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Publication

Featured researches published by Ishtak Karim.

Archive | 2010

Magnetic lensing to improve deposition uniformity in a physical vapor deposition (pvd) process

Karl Leeser; Ishtak Karim; Alexander Dulkin

Archive | 2014

Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS

Shruti Vivek Thombare; Ishtak Karim; Sanjay Gopinath; Reza Arghavani; Michal Danek

Archive | 2010

CREATION OF OFF-AXIS NULL MAGNETIC FIELD LOCUS FOR IMPROVED UNIFORMITY IN PLASMA DEPOSITION AND ETCHING

Karl Leeser; Ishtak Karim; Alexandre de Chambrier; Liqi Wu; Chunming Zhou

Archive | 2017

Systems and Methods for Using Electrical Asymmetry Effect to Control Plasma Process Space in Semiconductor Fabrication

Douglas Keil; Ishtak Karim; Yaswanth Rangineni; Adrien Lavoie; Yukinori Sakiyama; Edward Augustyniak; Karl Leeser; Chunhai Ji

Archive | 2014

Plasma process etch-to-deposition ratio modulation via ground surface design

Liqi Wu; Ishtak Karim; Huatan Qiu

Archive | 2014

Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor

Shruti Vivek Thombare; Ishtak Karim; Sanjay Gopinath; Michal Danek

Archive | 2013

APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADIANT ENERGY FROM A SINGLE LIGHT SOURCE

Vincent E. Burkhart; Yorkman Ma; Martin E. Freeborn; Ishtak Karim

Archive | 2012

Creation of magnetic field (vector potential) well for improved plasma deposition and resputtering uniformity

Liqi Wu; Ishtak Karim; Huatan Qiu; Kie-Jin Park; Chunming Zhou; Karthik Colinjivadi

Archive | 2018

SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT

Purushottam Kumar; Adrien Lavoie; Ishtak Karim; Jun Qian; Frank L. Pasquale; Bart van Schravendijk

Archive | 2017

Systems And Methods For Using Electrical Asymmetry Effect To Control Plasma Process Space

Douglas Keil; Edward Augustyniak; Yukinori Sakiyama; Yaswanth Rangineni; Adrien Lavoie; Karl Leeser; Ishtak Karim; Chunhai Ji

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Collaboration

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Adrien Lavoie

Lam Research

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Karl Leeser

Lam Research

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Douglas Keil

Lam Research

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Yaswanth Rangineni

Lam Research

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Yukinori Sakiyama

Lam Research

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Purushottam Kumar

Lam Research

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Ramesh Chandrasekharan

Lam Research

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Edward Augustyniak

Lam Research

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Jun Qian

Lam Research

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Liqi Wu

Applied Materials

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