Ramesh Chandrasekharan

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Ramesh Chandrasekharan is active.

Explore More

Publication

Featured researches published by Ramesh Chandrasekharan.

Archive | 2011

Plasma activated conformal film deposition

Adrien Lavoie; Shankar Swaminathan; Hu Kang; Ramesh Chandrasekharan; Tom Dorsh; Dennis M. Hausmann; Jon Henri; Thomas Jewell; Ming Li; Bryan Schlief; Antonio Xavier; Thomas W. Mountsier; Bart van Schravendijk; Easwar Srinivasan; Mandyam Sriram

Archive | 2013

DEPOSITION APPARATUS INCLUDING AN ISOTHERMAL PROCESSING ZONE

Ramesh Chandrasekharan; Jeremy Tucker; Karl Leeser; Alan M. Schoepp

Archive | 2013

Multi-plenum, dual-temperature showerhead

Ramesh Chandrasekharan; Jennifer Petraglia

Archive | 2013

SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR

Ramesh Chandrasekharan; Adrien Lavoie; Damien Slevin; Karl Leeser

Archive | 2012

Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region

Chunguang Xia; Ramesh Chandrasekharan; Douglas Keil; Edward Augustyniak; Karl Leeser

Archive | 2012

POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT

Ramesh Chandrasekharan; Chunguang Xia; Karl Leeser; Damien Slevin; Thomas Jewell

Archive | 2015

CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL

Ramesh Chandrasekharan; Saangrut Sangplung

Archive | 2016

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING

Chloe Baldasseroni; Adrien Lavoie; Hu Kang; Jun Qian; Purushottam Kumar; Andrew Duvall; Cody Barnett; Mohamed Sabri; Ramesh Chandrasekharan; Karl Leeser; David Charles Smith; Seshasayee Varadarajan; Edmund Minshall

Archive | 2011