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Karl Leeser

Lam Research

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Publication

Featured researches published by Karl Leeser.

Archive | 2013

DEPOSITION APPARATUS INCLUDING AN ISOTHERMAL PROCESSING ZONE

Ramesh Chandrasekharan; Jeremy Tucker; Karl Leeser; Alan M. Schoepp

Archive | 2013

SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR

Ramesh Chandrasekharan; Adrien Lavoie; Damien Slevin; Karl Leeser

Archive | 2013

High pressure, high power plasma activated conformal film deposition

Shankar Swaminathan; Frank L. Pasquale; Adrien Lavoie; Karl Leeser

Archive | 2012

Hybrid ceramic showerhead

Mohamed Sabri; Ramkishan Rao Lingampalli; Karl Leeser

Archive | 2014

Selective inhibition in atomic layer deposition of silicon-containing films

Jon Henri; Dennis M. Hausmann; Bart van Schravendijk; Shane Tang; Karl Leeser

Archive | 2014

MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL

Patrick Girard Breiling; Bhadri N. Varadarajan; Jennifer Petraglia; Bart van Schravendijk; Karl Leeser; Mandyam Sriram; Rachel E. Batzer

Archive | 2012

Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region

Chunguang Xia; Ramesh Chandrasekharan; Douglas Keil; Edward Augustyniak; Karl Leeser

Archive | 2012

POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT

Ramesh Chandrasekharan; Chunguang Xia; Karl Leeser; Damien Slevin; Thomas Jewell

Archive | 2011

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER

Douglas Keil; Edward Augustyniak; Karl Leeser; Mohamed Sabri

Archive | 2010

Magnetic lensing to improve deposition uniformity in a physical vapor deposition (pvd) process

Karl Leeser; Ishtak Karim; Alexander Dulkin

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Adrien Lavoie

Lam Research

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Ramesh Chandrasekharan

Lam Research

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Chloe Baldasseroni

Lam Research

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Douglas Keil

Lam Research

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Frank L. Pasquale

Lam Research

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Shankar Swaminathan

Lam Research

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Andrew Duvall

Lam Research

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David Charles Smith

Lam Research

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Hu Kang

Lam Research

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Ishtak Karim

Lam Research

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