Is this you? Create Your Porfile
Avatar

Ernst-christian Richter

Infineon Technologies

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Ernst-christian Richter is active.

Explore More

Publication

Featured researches published by Ernst-christian Richter.

Archive | 2003

Optical device for use with a lithography method

Ernst-christian Richter; Michael Sebald

Archive | 2002

Method for producing resist structures

Klaus Elian; Stefan Hien; Ernst-christian Richter; Michael Sebald

Archive | 2002

Process for structuring a photoresist layer

Ernst-christian Richter; Michael Sebald

Archive | 2003

Process for producing hard masks

Michael Sebald; Ernst-christian Richter

Archive | 2002

Method for experimentally verifying imaging errors in photomasks

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2002

Method for experimentally verifying imaging errors in optical exposure units

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Journal of Photopolymer Science and Technology | 1999

Novel Diffusion Analysis in Advanced Chemically Amplified DUV Resists Using Photometric Methods

Ernst-christian Richter; Stefan Hien; Michael Sebald

Archive | 2003

An optical device for use in a lithography process, in particular for the production of a semiconductor device, and optical lithography method.

Michael Sebald; Ernst-christian Richter

Archive | 2003

Process for modifying resist structures and resist films from the aqueous phase

Siew Siew Yip; Jörg Rottstegge; Ernst-christian Richter; Gertrud Falk; Michael Sebald; Kerstin Seibold; Marion Kern

Archive | 2002

Verfahren zur Herstellung von Hardmasken Process for the preparation of hard masks

Michael Sebald; Ernst-christian Richter

Explore More

Collaboration

Dive into the Ernst-christian Richter's collaboration.

Top Co-Authors
Avatar

Michael Sebald

Siemens

View shared research outputs
Top Co-Authors
Avatar

Ulrich Scheler

Siemens

View shared research outputs
Top Co-Authors
Avatar

Günther Czech

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Stefan Hien

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Gertrud Falk

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Guenther Czech

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Jörg Rottstegge

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Kerstin Seibold

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Klaus Elian

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Marion Kern

Infineon Technologies

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge