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Günther Czech

Infineon Technologies

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Publication

Featured researches published by Günther Czech.

Archive | 2000

Lithography method and lithography mask

Günther Czech; Christoph Friedrich; Carsten Fülber; Rainer Käsmaier; Dietrich Widmann

Archive | 2002

Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools

Christoph Nölscher; Armin Semmler; Günther Czech

Journal of Photopolymer Science and Technology | 1999

Thin film imaging with CARL ©photoresist at the optical resolution limit

Stefan Hien; Günther Czech; Wolf-Dieter Domke; Ernst Richter; Michael Sebald; Iris Stiebert

Archive | 2002

Method for experimentally verifying imaging errors in photomasks

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2002

Method for experimentally verifying imaging errors in optical exposure units

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2001

Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements

Günther Czech; Wolfgang Henke; Carsten Fülber

Archive | 2001

Experimental procedure for the verification of aberrations in photomasks

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2001

Experimentelles Verfahren zur Verifikation von Abbildungsfehlern bei optischen Belichtungsgeräten

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2001

Experimentelles Verfahren zur Verifikation von Abbildungsfehlern bei optischen Belichtungsgeräten Experimental procedure for the verification of aberrations in the optical exposure devices

Günther Czech; Ernst-christian Richter; Ulrich Scheler; Michael Sebald

Archive | 2001

Double exposure with imaging auxiliary structures and different exposure tools

Günther Czech; Christoph Nölscher; Armin Semmler

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Collaboration

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Michael Sebald

Siemens

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Ernst-christian Richter

Infineon Technologies

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Ulrich Scheler

Siemens

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Carsten Fülber

Infineon Technologies

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Armin Semmler

Infineon Technologies

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Christoph Nölscher

Infineon Technologies

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Wolfgang Henke

Infineon Technologies

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Christoph Friedrich

Infineon Technologies

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Dietrich Widmann

Infineon Technologies

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Ernst Richter

Infineon Technologies

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