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Gildardo Delgado

KLA-Tencor

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Publication

Featured researches published by Gildardo Delgado.

Archive | 2013

Back-Illuminated Sensor With Boron Layer

Jehn-Huar Howard Chern; Ali R. Ehsani; Gildardo Delgado; David L. Brown; Yung-Ho Alex Chuang

Archive | 2005

Broadband plasma light sources with cone-shaped electrode for substrate processing

Gildardo Delgado

Archive | 2011

Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping

Gildardo Delgado; Frank Chilese; Rudolf Brunner

Archive | 2011

Laser-produced plasma euv source with reduced debris generation

Gildardo Delgado; Daniel Wack

Archive | 2015

Laser-sustained plasma light source

Ilya Bezel; Anatoly Shchemelinin; Yanming Zhao; Gildardo Delgado

Archive | 2013

Protective fluorine-doped silicon oxide film for optical components

Gildardo Delgado

Archive | 2014

Methods and apparatus for use with extreme ultraviolet light having contamination protection

Francis C. Chilese; John Robert Torczynski; Rudy F. Garcia; Leonard E. Klebanoff; Gildardo Delgado; Daniel J. Rader; Anthony S. Geller; Michail A. Gallis

Archive | 2014

System and Method for Cleaning Optical Surfaces of an Extreme Ultraviolet Optical System

Gildardo Delgado; Francis C. Chilese; Rudy F. Garcia; Mohammed Tahmassebpur; Salam Harb

Archive | 2013

System and Method for Particle Control Near A Reticle

Gildardo Delgado; Frank Chilese

Archive | 2013

INDEXING OPTICS FOR AN ACTINIC EXTREME ULTRA-VIOLET (EUV) RETICLE INSPECTION TOOL

Gildardo Delgado; Frank Chilese

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Collaboration

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Frank Chilese

KLA-Tencor

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Garry Rose

KLA-Tencor

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Rudy F. Garcia

KLA-Tencor

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Leonard E. Klebanoff

KLA-Tencor

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Daniel Wack

KLA-Tencor

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Ali R. Ehsani

KLA-Tencor

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Anatoly Shchemelinin

KLA-Tencor

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David L. Brown

KLA-Tencor

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Francis C. Chilese

KLA-Tencor

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Guorong V. Zhuang

KLA-Tencor

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