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Dive into the research topics where Donny Young is active.

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Featured researches published by Donny Young.


Archive | 2010

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS

Adolph Miller Allen; Lara Hawrylchak; Zhigang Xie; Muhammand M. Rasheed; Rongjun Wang; Xianmin Tang; Zhendong Liu; Tza-Jing Gung; Srinivas Gandikota; Mei Chang; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Zhenbin Ge


Archive | 2006

SPUTTERING TARGET FOR TITANIUM SPUTTERING CHAMBER

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible


Archive | 2004

Mechanism for varying the spacing between sputter magnetron and target

Ilyoung Richard Hong; Donny Young; Michael Rosenstein; Robert B. Lowrance; Daniel C. Lubben; Michael Miller; Peijun Ding; Sreekrishnan Sankaranarayan; Goichi Yoshidome


Archive | 2009

Process kit for rf physical vapor deposition

Donny Young; Lara Hawrylchak


Archive | 2006

Target for sputtering chamber

Alan Ritchie; Donny Young; Ilyoung Richard Hong; Kathleen Scheible; Umesh Kelkar


Archive | 2006

Process kit components for titanium sputtering chamber

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible


Archive | 2002

High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications

Karl M. Brown; Cheng-hsiung Matt Tsai; Donny Young; Vineet Mehta; David Loo


Archive | 2011

Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit

Muhammad Rasheed; Ronald D. Dedore; Michael S. Cox; Keith A. Miller; Donny Young; John C. Forster; Adolph Miller Allen; Lara Hawrylchak


Archive | 2003

Magnet secured in a two part shell

Anthony Vesci; Alan B. Liu; Donny Young; Joe F. Sommers; Kevin Hughes


Archive | 2011

APPARATUS FOR PHYSICAL VAPOR DEPOSITION HAVING CENTRALLY FED RF ENERGY

Muhammad Rasheed; Lara Hawrylchak; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Alan Ritchie

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