Daniel C. Lubben | Researchain

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Featured researches published by Daniel C. Lubben.

Archive | 2004

Compensation of spacing between magnetron and sputter target

Peijun Ding; Daniel C. Lubben; Ilyoung Richard Hong; Michael Miller; Hsien-Lung Yang; Suraj Rengarajan; Arvind Sundarrajan; Goichi Yoshidome

Archive | 2003

Small epicyclic magnetron with controlled radial sputtering profile

Michael Miller; James H. Tsung; Daniel C. Lubben; Ilyoung Richard Hong; Peijun Ding

Archive | 2002

Small planetary magnetron

Ilyoung Richard Hong; James H. Tsung; Daniel C. Lubben; Peijun Ding; Nirmalya Maity

Archive | 2004

Mechanism for varying the spacing between sputter magnetron and target

Ilyoung Richard Hong; Donny Young; Michael Rosenstein; Robert B. Lowrance; Daniel C. Lubben; Michael Miller; Peijun Ding; Sreekrishnan Sankaranarayan; Goichi Yoshidome

Archive | 2007

Resputtered copper seed layer

Xianmin Tang; Arvind Sundarrajan; Daniel C. Lubben; Qian Luo; Tza-Jing Gung; Anantha K. Subramani; Hua Chung; Xinyu Fu; Rongjun Wang; Yong Cao; Jick M. Yu; John C. Forster; Praburam Gopalraja

Archive | 2009