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Dive into the research topics where Ilyoung Richard Hong is active.

Publication


Featured researches published by Ilyoung Richard Hong.


Archive | 1999

Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance

Darryl Angelo; Arvind Sundarrajan; Peijun Ding; James H. Tsung; Ilyoung Richard Hong; Barry Chin


Archive | 2007

Process kit for substrate processing chamber

Christopher M. Pavloff; Ilyoung Richard Hong


Archive | 2004

Compensation of spacing between magnetron and sputter target

Peijun Ding; Daniel C. Lubben; Ilyoung Richard Hong; Michael Miller; Hsien-Lung Yang; Suraj Rengarajan; Arvind Sundarrajan; Goichi Yoshidome


Archive | 2003

Small epicyclic magnetron with controlled radial sputtering profile

Michael Miller; James H. Tsung; Daniel C. Lubben; Ilyoung Richard Hong; Peijun Ding


Archive | 2002

Small planetary magnetron

Ilyoung Richard Hong; James H. Tsung; Daniel C. Lubben; Peijun Ding; Nirmalya Maity


Archive | 2006

SPUTTERING TARGET FOR TITANIUM SPUTTERING CHAMBER

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible


Archive | 2004

Mechanism for varying the spacing between sputter magnetron and target

Ilyoung Richard Hong; Donny Young; Michael Rosenstein; Robert B. Lowrance; Daniel C. Lubben; Michael Miller; Peijun Ding; Sreekrishnan Sankaranarayan; Goichi Yoshidome


Archive | 2006

Target for sputtering chamber

Alan Ritchie; Donny Young; Ilyoung Richard Hong; Kathleen Scheible; Umesh Kelkar


Archive | 2006

Process kit components for titanium sputtering chamber

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible


Archive | 2006

Position controlled dual magnetron

Cristopher M. Pavloff; Winsor Lam; Tza-Jing Gung; Hong S. Yang; Ilyoung Richard Hong

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