Haowen Bu
Texas Instruments
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Publication
Featured researches published by Haowen Bu.
IEEE Transactions on Semiconductor Manufacturing | 2005
Yuanning Chen; Haowen Bu; Stephanie Watts Butler; Kevin L. Cunningham; Shulin Wang; Bill Spicer
The polycrystalline silicon deposited by single-wafer rapid thermal chemical vapor deposition with both silane (SiH/sub 4/) and disilane (Si/sub 2/H/sub 6/) precursors have been characterized for across wafer uniformity, thickness repeatability, and basic material properties such as grain structure and surface topography. The results show that the disilane process greatly improves the manufacturability of the single-wafer polycrystalline silicon process. Specifically, a /spl sim/50% improvement in the thickness uniformity, /spl sim/25% improvement in surface roughness, and a significantly less sensitivity of the process to hardware have been achieved with similar particle performance. The grain structure of as-deposited and postimplant and anneal films have been compared by X-ray diffraction and transmission electron microscope. NMOS and PMOS capacitors have been fabricated with polycrystalline silicon using silane and disilane precursors. The grain structure and electrical parameters, such as gate leakage currents and gate capacitance, show no significant difference between these two precursors.
Archive | 2002
Haowen Bu; Stephanie Watts Butler; Rajesh Khamankar; Hiroaki Niimi
Archive | 2002
Haowen Bu; Amitabh Jain; Wayne Bather; Stephanie Watts Butler
Archive | 2006
Haowen Bu; Brian Hornung; Periannan Chidambaram; Amitabh Jain; Rajesh Khamankar; Nandu Mahalingam; Srinivansan Chakravarthi
Archive | 2003
Haowen Bu; Clinton L. Montgomery; Amitabh Jain
Meeting Abstracts | 2008
Deborah J. Riley; Haowen Bu; Amitabh Jain; Rajesh Khamankar
Archive | 2005
Haowen Bu; Brian Hornung; Periannan Chidambaram; Amitabh Jain; Rajesh Khamankar; Nandu Mahalingam; Chakravarthi Srinivasan
Archive | 2006
Srinivasan Chakravarthi; Periannan Chidambaram; Rajesh Khamankar; Haowen Bu; Douglas T. Grider
Archive | 2006
Srinivasan Chakravarthi; Periannan Chidambaram; Rajesh Khamankar; Haowen Bu; Douglas T. Grider
Archive | 2005
Haowen Bu; Rajesh Khamankar; Douglas T. Grider