Haraguchi Takashi | Researchain

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Archive | 2007

LEVENSON TYPE PHASE SHIFT MASK AND METHOD FOR MANUFACTURING SAME

Kojima Yosuke; Chiba Kazuaki; Haraguchi Takashi; Yoshikawa Hiroki; Inazuki Sadaomi; Kaneko Hideo; Okazaki Satoshi

Archive | 2005

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR TRANSFERRING PATTERN

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Sadaomi; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2005

TARGET FOR FORMING FILM AND METHOD FOR MANUFACTURING PHASE SHIFT MASK BLANK

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Sadaomi; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2015

PHOTO PATTERN IRRADIATION METHOD

Yoshikawa Hiroki; Inazuki Sadaomi; Koitabashi Ryuji; Kaneko Hideo; Haraguchi Takashi; Kojima Yosuke; Hirose Tomokazu

Archive | 2012

PHOTO MASK, PHOTO MASK BLANK AND PHOTO MASK MANUFACTURING METHOD

Hamamoto Yoshinao; Haraguchi Takashi; Sakamoto Yoshifumi; Kojima Yosuke

Archive | 2004

HALFTONE PHASE SHIFT MASK BLANK, ITS MANUFACTURING METHOD AND HALFTONE PHASE SHIFT MASK

Takagi Mikio; Haraguchi Takashi; Matsuo Tadashi

Archive | 2016

PHOTOMASK BLANK, PHOTOMASK AND LIGHT PATTERN IRRADIATION METHOD

Yoshikawa Hiroki; Inazuki Sadaomi; Koitabashi Ryuji; Kaneko Hideo; Haraguchi Takashi; Kojima Yosuke; Hirose Tomokazu

Archive | 2011

Film-depositing target and preparation of phase sh

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Yukio; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2009