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Yoshikawa Hiroki

Shin-Etsu Chemical

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Publication

Featured researches published by Yoshikawa Hiroki.

Archive | 2004

PHASE SHIFT MASK BLANK AND PHASE SHIFT PHOTOMASK

Tsukamoto Tetsushi; Yoshikawa Hiroki; Kaneko Hideo; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2015

Negative electrode active material, production method for negative electrode active material, and lithium ion secondary battery

Hirose Takakazu; Kamo Hiromichi; Yoshikawa Hiroki

Archive | 2016

Negative-electrode active substance, negative electrode active substance material, negative electrode, lithium ion secondary battery, negative electrode active substance manufacturing method, and lithium ion secondary battery manufacturing method

Hirose Takakazu; Kamo Hiromichi; Yoshikawa Hiroki

Archive | 2007

LEVENSON TYPE PHASE SHIFT MASK AND METHOD FOR MANUFACTURING SAME

Kojima Yosuke; Chiba Kazuaki; Haraguchi Takashi; Yoshikawa Hiroki; Inazuki Sadaomi; Kaneko Hideo; Okazaki Satoshi

Archive | 2004

METHOD FOR MANUFACTURING PHASE SHIFT MASK BLANK AND METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND PHASE SHIFT MASK BLANK AND PHASE SHIFT MASK

Inazuki Sadaomi; Yoshikawa Hiroki; Kaneko Hideo; Okazaki Satoshi

Archive | 2005

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR TRANSFERRING PATTERN

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Sadaomi; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2015

NEGATIVE ELECTRODE ACTIVE SUBSTANCE, NEGATIVE ELECTRODE ACTIVE SUBSTANCE MATERIAL, NEGATIVE ELECTRODE, LITHIUM ION SECONDARY BATTERY, METHOD FOR MANUFACTURING NEGATIVE ELECTRODE, METHOD FOR MANUFACTURING NEGATIVE ELECTRODE ACTIVE SUBSTANCE, AND METHOD FOR MANUFACTURING LITHIUM ION SECONDARY BATTERY

Hirose Kiichi; Kamo Hiromichi; Yoshikawa Hiroki

Archive | 2015

SILICON-CONTAINING MATERIAL, NEGATIVE ELECTRODE FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, MANUFACTURING METHOD THEREOF, NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, AND MANUFACTURING METHOD THEREOF

Yoshikawa Hiroki; Kamo Hiromichi

Archive | 2005

TARGET FOR FORMING FILM AND METHOD FOR MANUFACTURING PHASE SHIFT MASK BLANK

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Sadaomi; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2004

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR DEPOSITING PHASE SHIFT FILM

Fukushima Chikayasu; Yoshikawa Hiroki; Inazuki Sadaomi; Okazaki Satoshi

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Collaboration

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Kamo Hiromichi

Shin-Etsu Chemical

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Hirose Takakazu

Shin-Etsu Chemical

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Furuya Masahiro

Shin-Etsu Chemical

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Matsuno Takumi

Shin-Etsu Chemical

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Okazaki Satoshi

Shin-Etsu Chemical

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Takahashi Kohta

Shin-Etsu Chemical

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Awano Hidekazu

Shin-Etsu Chemical

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Kaneko Hideo

Shin-Etsu Chemical

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Haraguchi Takashi

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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