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international reliability physics symposium | 2006

Retention Reliability of FinFET SONOS Device

Jong Jin Lee; Se-Hoon Lee; Hee-soon Chae; Byung Yong Choi; Suk-kang Sung; Seok Pil Kim; Eun Suk Cho; Choong Ho Lee; Donggun Park

This paper presents the retention reliability of the FinFET SONOS flash memory. By understanding the charge loss mechanisms of the SONOS structure, a new approach for the prediction of long term retention lifetime have been proposed. The comparison between the thermal-accelerated and field-accelerated lifetime has been demonstrated


Japanese Journal of Applied Physics | 2006

Retention Mechanism of Localized Silicon–Oxide–Nitride–Oxide–Silicon Embedded NOR Device

Jae-woong Hyun; Younseok Jeong; Hee-soon Chae; Sunae Seo; Jin-Hee Kim; Myung-Yoon Um; Byoung-Jin Lee; Ki-chul Kim; In-Wook Cho; Geum-Jong Bae; Nae-In Lee; Chung-woo Kim

Reliability studies of localized oxide–nitride–oxide memory (LONOM) devices are presented. The observed reduction in channel threshold voltage as a result of the retention charge loss of a programmed cell is demonstrated in terms of vertical leakage paths. Despite the apparent controversy of charge transport with nitride read-only memory (NROM) devices, the vertical paths are evidently observed via the channel and junction threshold voltage changes, which were monitored using Ids–Vds curves and gate-induced drain leakage (GIDL) measurements, visualizing the internal status of interface charges and stored charges in a nitride layer.


2006 21st IEEE Non-Volatile Semiconductor Memory Workshop | 2006

TWIn SONOS TransistOR (TWISTOR) for 2-bit/cell SONOS Memory Technology

Byung Yong Choi; Byung-Gook Park; Jong Duk Lee; Hyungcheol Shin; Yong Kyu Lee; Suk-Kang Sung; Se-Hoon Lee; Hee-soon Chae; Jong Jin Lee; Keun Hee Bai; Dong-Dae Kim; Dong-Won Kim; Choong-ho Lee; Donggun Park

In terms of nonvolatile memory device characteristics, the optimal device parameters for the TWISTOR (twin SONOS transistor) structure are investigated. Through this study, we show the best performance of 80nm gate TWISTOR device, which are very promising solution of future 2-bit/cell SONOS technology


Archive | 2003

Nonvolatile silicon/oxide/nitride/silicon/nitride/oxide/silicon memory

Soo-doo Chae; Ju-Hyung Kim; Chung-woo Kim; Hee-soon Chae; Won-il Ryu


Archive | 2005

Complementary nonvolatile memory device, methods of operating and manufacturing the same, logic device and semiconductor device including the same, and reading circuit for the same

Yoon-dong Park; Jo-won Lee; Chung-woo Kim; Eun-hong Lee; Sun-Ae Seo; Woo-joo Kim; Hee-soon Chae; Soo-doo Chae; I-hun Song


Archive | 2002

Single electron memory device comprising quantum dots between gate electrode and single electron storage element and method for manufacturing the same

Soo-doo Chae; Byong-man Kim; Moonkyung Kim; Hee-soon Chae; Won-il Ryu


Archive | 2004

Silicon-oxide-nitride-oxide-silicon (SONOS) memory device and methods of manufacturing and operating the same

Moon-kyung Kim; C. W. Kim; Jo-won Lee; Eun-hong Lee; Hee-soon Chae


Archive | 2003

Method for manufacturing a single electron memory device having quantum dots between gate electrode and single electron storage element

Soo-doo Chae; Byong-man Kim; Moon-kyung Kim; Hee-soon Chae; Won-il Ryu


Archive | 2001

Method for etching metal layer on a scale of nanometers

Byong-man Kim; Soo-doo Chae; Hee-soon Chae; Won-il Ryu


Archive | 2005

Complementary nonvolatile memory device

Yoon-dong Park; Jo-won Lee; Chung-woo Kim; Eun-hong Lee; Sun-Ae Seo; Woo-joo Kim; Hee-soon Chae; Soo-doo Chae; I-hun Song

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