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Byung-Sung Kwak

LSI Corporation

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Publication

Featured researches published by Byung-Sung Kwak.

Archive | 2004

Integrated barrier and seed layer for copper interconnect technology

Sey-Shing Sun; Byung-Sung Kwak; Peter A. Burke

Archive | 2005

Self-aligned cell integration scheme

Richard Carter; Hemanshu D. Bhatt; Shiqun Gu; Peter A. Burke; James R. B. Elmer; Sey-Shing Sun; Byung-Sung Kwak; Verne Hornback

Archive | 2003

Method of fabricating an alloy cap layer over CU wires to improve electromigration performance of CU interconnects

Sey-Shing Sun; Byung-Sung Kwak; Jayanthi Pallinti; William K. Barth

Archive | 2004

Method for fabricating planar semiconductor wafers

Byung-Sung Kwak; Peter A. Burke; Sey-Shing Sun

Archive | 2005

Forming copper interconnects with Sn coatings

Hong-Qiang Lu; Byung-Sung Kwak; Wilbur G. Catabay

Archive | 2005

Method and apparatus for diverting void diffusion in integrated circuit conductors

Derryl D. J. Allman; Hemanshu D. Bhatt; Charles E. May; Peter A. Burke; Byung-Sung Kwak; Sey-Shing Sun; David T. Price; David Pritchard

Archive | 2004

Method for improved local planarity control during electropolishing

Byung-Sung Kwak; Jayanthi Pallinti; Sey-Shing Sun; William K. Barth; Wilbur G. Catabay

Archive | 2003

PROCESS FOR REDUCING IMPURITY LEVELS, STRESS, AND RESISTIVITY, AND INCREASING GRAIN SIZE OF COPPER FILLER IN TRENCHES AND VIAS OF INTEGRATED CIRCUIT STRUCTURES TO ENHANCE ELECTRICAL PERFORMANCE OF COPPER FILLER

Byung-Sung Kwak; Jayanthi Pallinti; William K. Barth

Archive | 2005

Method and apparatus for redirecting void diffusion away from vias in an integrated circuit design

Derryl D. J. Allman; Hemanshu D. Bhatt; Charles E. May; Peter A. Burke; Byung-Sung Kwak; Sey-Shing Sun; David T. Price; David Pritchard

Archive | 2004

Contact ring design for reducing bubble and electrolyte effects during electrochemical plating in manufacturing

Byung-Sung Kwak; Gregory Frank Piatt; Hiroshi Mizuno

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Sey-Shing Sun

LSI Corporation

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Peter A. Burke

LSI Corporation

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Hemanshu D. Bhatt

LSI Corporation

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Charles E. May

LSI Corporation

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David Pritchard

LSI Corporation

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David T. Price

LSI Corporation

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Derryl D. J. Allman

LSI Corporation

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Jayanthi Pallinti

LSI Corporation

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William K. Barth

LSI Corporation

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Wilbur G. Catabay

LSI Corporation

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