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Henry Bernhardt

Infineon Technologies

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Publication

Featured researches published by Henry Bernhardt.

Archive | 2005

Method for fabricating an integrated circuit on a semiconductor substrate

Thomas Hecht; Henry Bernhardt; Christian Kapteyn

Archive | 2004

Method of forming thin dielectric layers

Henry Bernhardt; Volker Hemel

Archive | 2008

Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer

Bernd Hintze; Henry Bernhardt; Frank Bernhardt

Archive | 2003

HEATING SYSTEM, METHOD FOR HEATING A DEPOSITION OR OXIDATION REACTOR, AND REACTOR INCLUDING THE HEATING SYSTEM

Henry Bernhardt; Thomas Seidemann; Michael Stadtmueller

Archive | 2006

Structure in a substrate for the manufacturing of a semiconductor device and process for manufacturing of a semiconductor device

Thomas Hecht; Kristin Schupke; Kevin Bauer; Steffen Mueller; Henry Bernhardt

Archive | 2004

Trench capacitor structure and process for applying a covering layer and a mask for trench etching processes in semiconductor substrates

Henry Bernhardt; Michael Stadtmüller; Olaf Storbeck; Stefan Kainz

Archive | 2003

Process for forming nitride-oxide dielectric layers

Henry Bernhardt; Olaf Storbeck

Archive | 2001

Heating system and method for heating a reactor

Henry Bernhardt; Michael Stadtmueller; Thomas Seidemann

Archive | 2002

Method for the deposition of silicon nitride

Henry Bernhardt; Michael Stadtmueller; Dietmar Ottenwaelder; Anja Morgenschweis

Archive | 2006

Dielectric intermediate layer producing method for use in storage capacitor, involves forming metal oxide and metal nitride layers, oxidizing nitride layer to form another metal oxide layer, and heating layer sequence to form mixing layer

Bernd Hintze; Henry Bernhardt; Frank Bernhardt

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Collaboration

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Michael Stadtmueller

Infineon Technologies

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Olaf Storbeck

Qimonda

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Thomas Hecht

Infineon Technologies

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Thomas Seidemann

Infineon Technologies

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Christian Kapteyn

Infineon Technologies

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Michael Stadtmüller

Infineon Technologies

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Stefan Kainz

Infineon Technologies

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Bernd Hintze

Infineon Technologies

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Anja Morgenschweis

Infineon Technologies

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Dietmar Ottenwaelder

Infineon Technologies

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