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Hiroshi Sotozaki

Ebara Corporation

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Publication

Featured researches published by Hiroshi Sotozaki.

Archive | 2004

Method and apparatus for polishing a substrate

Hiroshi Sotozaki; Koji Ato

Archive | 2009

Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino

Archive | 2003

Polishing device and substrate processing device

Satoshi Wakabayashi; Tetsuji Togawa; Ryuichi Kosuge; Koji Ato; Hiroshi Sotozaki

Archive | 2007

Substrate treating device, substrate convey device, substrate grasping device, and chemical solution treating device

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 2007

Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 1999

Method and apparatus for polishing substrate

Hiroshi Sotozaki; Koji Ato

Archive | 2002

Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus

Hiroshi Sotozaki

Archive | 2012

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER DEVICE

Toshio Yokoyama; Junji Kunisawa; Mitsuru Miyazaki; Kenichi Suzuki; Hiroshi Sotozaki

Archive | 2007

基板処理装置、基板搬送装置、基板把持装置、および薬液処理装置

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 1999

Verfahren und Vorrichtung zum Polieren von Substraten Method and apparatus for polishing substrates

Koji Ato; Hiroshi Sotozaki

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Collaboration

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Koji Ato

Ebara Corporation

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Ryuichi Kosuge

Ebara Corporation

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Takahiro Ogawa

Ebara Corporation

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Hiroaki Nishida

Ebara Corporation

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Hiroomi Torii

Ebara Corporation

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Hiroyuki Kaneko

Ebara Corporation

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Kenichi Sugita

Ebara Corporation

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Soichi Isobe

Ebara Corporation

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Tadakazu Sone

Ebara Corporation

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Takao Mitsukura

Ebara Corporation

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