Is this you? Create Your Porfile
Avatar

Tadakazu Sone

Ebara Corporation

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Tadakazu Sone is active.

Explore More

Publication

Featured researches published by Tadakazu Sone.

Archive | 2000

Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof

Seiji Katsuoka; Hozumi Yasuda; Tadakazu Sone; Shunichiro Kojima; Manabu Tsujimura

Archive | 2010

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPARATUS FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD USED IN POLISHING APPARATUS

Tadakazu Sone; Yasuyuki Motoshima; Toru Maruyama; Katsutoshi Ono; Yoichi Shiokawa

Archive | 2007

Substrate treating device, substrate convey device, substrate grasping device, and chemical solution treating device

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 2007

Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 2006

Polishing platen and polishing apparatus

Takuji Kobayashi; Hideo Aizawa; Masao Umemoto; Tadakazu Sone; Hiroomi Torii; Nobuyuki Takahashi; Takashi Tsuzuki

Archive | 2006

Wafer Transferring Apparatus, Polishing Apparatus, and Wafer Receiving Method

Nobuyuki Takahashi; Tadakazu Sone; Takuji Kobayashi; Hiroomi Torii

Archive | 2012

POLISHING APPARATUS HAVING TEMPERATURE REGULATOR FOR POLISHING PAD

Toru Maruyama; Tadakazu Sone; Yasuyuki Motoshima

Archive | 2002

Polishing system with air exhaust system

Soichi Isobe; Tadakazu Sone; Takuji Hayama; Manabu Tsujimura

Archive | 2013

WORKPIECE TRANSPORT DEVICE

Ryuichi Kosuge; Hiroaki Nishida; Tadakazu Sone; Hideo Aizawa; Tomohiro Tanaka

Archive | 2013

GAS-LIQUID SEPARATOR AND POLISHING APPARATUS

Hideo Aizawa; Tadakazu Sone; Masao Umemoto

Explore More

Collaboration

Dive into the Tadakazu Sone's collaboration.

Top Co-Authors
Avatar

Hideo Aizawa

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Ryuichi Kosuge

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroomi Torii

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Soichi Isobe

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroaki Nishida

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Masao Umemoto

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Nobuyuki Takahashi

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroshi Aono

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroshi Sotozaki

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroyuki Kaneko

Ebara Corporation

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge