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Ryuichi Kosuge

Ebara Corporation

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Publication

Featured researches published by Ryuichi Kosuge.

Archive | 2003

Polishing device and substrate processing device

Satoshi Wakabayashi; Tetsuji Togawa; Ryuichi Kosuge; Koji Ato; Hiroshi Sotozaki

Archive | 2007

Substrate treating device, substrate convey device, substrate grasping device, and chemical solution treating device

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 2007

Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita

Archive | 2010

APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

Katsuhide Watanabe; Ryuichi Kosuge; Soichi Isobe

Archive | 2007

Apparatus for heating and cooling abrasive surface of grinder

Shiyunichi Aiyoshizawa; Yu Ishii; Akira Kato; Ryuichi Kosuge; 亮 加藤; 隆一 小菅; 俊一 相吉澤; 遊 石井

Archive | 2008

Apparatus for heating or cooling a polishing surface of a polishing apparatus

Shunichi Aiyoshizawa; Ryuichi Kosuge; Ryo Kato; Yu Ishii

Archive | 2013

WORKPIECE TRANSPORT DEVICE

Ryuichi Kosuge; Hiroaki Nishida; Tadakazu Sone; Hideo Aizawa; Tomohiro Tanaka

Archive | 2013

Polishing device and polishing pad bonding method

Ryuichi Kosuge; 隆一 小菅; Chuichi Sone; 忠一 曽根; Soichi Isobe; 壮一 磯部

Archive | 2007

Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid

Koji Maeda; Ryuichi Kosuge; Hiroshi Shimomoto; Soichi Isobe; Toru Niwa

Archive | 2015

ROTARY JOINT AND POLISHING APPARATUS

Hideo Aizawa; Tadakazu Sone; Masao Umemoto; Ryuichi Kosuge

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Collaboration

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Tadakazu Sone

Ebara Corporation

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Soichi Isobe

Ebara Corporation

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Hiroaki Nishida

Ebara Corporation

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Hiroshi Sotozaki

Ebara Corporation

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Hideo Aizawa

Ebara Corporation

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Hiroomi Torii

Ebara Corporation

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Hiroyuki Kaneko

Ebara Corporation

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Kenichi Sugita

Ebara Corporation

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Masao Umemoto

Ebara Corporation

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Takahiro Ogawa

Ebara Corporation

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