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Publication


Featured researches published by Soichi Isobe.


Archive | 1995

Mounting structure for mounting a polygon mirror

Soichi Isobe; Kazunori Hashimoto; Tohru Maruyama


Archive | 2007

Substrate treating device, substrate convey device, substrate grasping device, and chemical solution treating device

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita


Archive | 2006

Substrate delivery mechanism

Soichi Isobe; Hideo Aizawa; Hiroomi Torii; Daisuke Koga; Satoshi Wakabayashi


Archive | 2007

Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus

Nobuyuki Takahashi; Hiroaki Nishida; Hiroomi Torii; Soichi Isobe; Tadakazu Sone; Ryuichi Kosuge; Hiroyuki Kaneko; Hiroshi Sotozaki; Takao Mitsukura; Takahiro Ogawa; Kenichi Sugita


Archive | 2010

APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

Katsuhide Watanabe; Ryuichi Kosuge; Soichi Isobe


Archive | 1994

Polygon mirror with embedded yoke

Soichi Isobe; Kimio Komata; Toshiaki Ishii; Yuuichi Komai


Archive | 2003

Substrate delivery method, a substrate delivery mechanism and a substrate polishing apparatus

Soichi Isobe; Hideo Aizawa; Hiroomi Torii; Daisuke Koga; Satoshi Wakabayashi


Archive | 2002

Polishing system with air exhaust system

Soichi Isobe; Tadakazu Sone; Takuji Hayama; Manabu Tsujimura


Archive | 2002

SUBSTRATE DELIVERY METHOD, SUBSTRATE DELIVERY MECHANISM, AND SUBSTRATE POLISHING DEVICE

Hideo Aizawa; Soichi Isobe; Daisuke Koga; Hiroomi Torii; Satoshi Wakabayashi; 古賀 大輔; 相澤 英夫; 磯部 壮一; 若林 聡; 鳥居 弘臣


Archive | 1997

Polygon mirror mounting structure

Soichi Isobe; Masaaki Sano; Yoshio Inoue; Kazuo Shimizu

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