Hua Chung | Researchain

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Featured researches published by Hua Chung.

Archive | 2000

Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques

Moris Kori; Alfred Mak; Jeong Soo Byun; Lawrence Chung-Lai Lei; Hua Chung; Ashok K. Sinha; Ming Xi

Archive | 2002

Method for depositing refractory metal layers employing sequential deposition techniques

Hongbin Fang; Hyungsuk Alexander Yoon; Ken Kaung Lai; Chi Chung Young; James Horng; Ming Xi; Michael X. Yang; Hua Chung

Archive | 2008

Methods for depositing tungsten layers employing atomic layer deposition techniques

Ken Kaung Lai; Ravi Rajagopalan; Amit Khandelwal; Madhu Moorthy; Srinivas Gandikota; Joseph Castro; Avgerinos V. Gelatos; Cheryl Knepfler; Ping Jian; Hongbin Fang; Chao-Ming Huang; Ming Xi; Michael X. Yang; Hua Chung; Jeong Soo Byun

Archive | 2002

Formation of composite tungsten films

Ken K. Lai; Jeong Soo Byun; Frederick C. Wu; Ramanujapuran A. Srinivas; Avgerinos V. Gelatos; Mei Chang; Moris Kori; Ashok K. Sinha; Hua Chung; Hongbin Fang; Alfred Mak; Michael X. Yang; Ming Xi

Archive | 2001

Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films

Anh N. Nguyen; Michael Yang; Ming Xi; Hua Chung; Anzhong Chang; Xiaoxiong Yuan; Siqing Lu

Archive | 2002

Formation of titanium nitride films using a cyclical deposition process

Hua Chung; Hongbin Fang; Ken Lai; Jeong Byun; Alfred Mak; Michael Yang; Ming Xi; Moris Kori; Xinliang Lu; Ping Jian

Archive | 2001

System and method to form a composite film stack utilizing sequential deposition techniques

Alfred Mak; Mei Chang; Jeong Soo Byun; Hua Chung; Ashok K. Sinha; Moris Kori

Archive | 2008

Method for forming tungsten materials during vapor deposition processes

Moris Kori; Alfred Mak; Jeong Soo Byun; Lawrence Chung-Lai Lei; Hua Chung; Ashok K. Sinha; Ming Xi

Archive | 2006

Method and system for controlling the presence of fluorine in refractory metal layers

Moris Kori; Alfred Mak; Jeong Soo Byun; Lawrence Chung-Lai Lei; Hua Chung; Ashok K. Sinha; Ming Xi

Archive | 2001

Method and apparatus for forming nucleation layer by depositing refractory metal layer using sequential depositing technique

Jeong Soo Byun; Hua Chung; Moris Kori; Ken Kaung Lai; Chun-Rai Ray Lawrence; Karl A. Littau; Xinliang Lu; Alfred Mak; Shi Min; Ashok K. Sinha; シンハアショック; ダブリューマックアルフレッド; エイリットーカール; カウンライケン; スービュンジェオン; ルシンリアン; チュンフア; シミン; コリモーリス; チュン−ライレイローレンス

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