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Ken Kaung Lai

Applied Materials

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Publication

Featured researches published by Ken Kaung Lai.

Archive | 2002

Method for depositing refractory metal layers employing sequential deposition techniques

Hongbin Fang; Hyungsuk Alexander Yoon; Ken Kaung Lai; Chi Chung Young; James Horng; Ming Xi; Michael X. Yang; Hua Chung

Archive | 2008

Methods for depositing tungsten layers employing atomic layer deposition techniques

Ken Kaung Lai; Ravi Rajagopalan; Amit Khandelwal; Madhu Moorthy; Srinivas Gandikota; Joseph Castro; Avgerinos V. Gelatos; Cheryl Knepfler; Ping Jian; Hongbin Fang; Chao-Ming Huang; Ming Xi; Michael X. Yang; Hua Chung; Jeong Soo Byun

Archive | 2002

Pulsed nucleation deposition of tungsten layers

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi

Archive | 2000

Showerhead with reduced contact area

Karl A. Littau; Bevan Vo; Salvador P. Umotoy; Son Trinh; Chien-Teh Kao; Ken Kaung Lai; Bo Zheng; Ping Jian; Siqing Lu; Anzhong Chang

Archive | 2000

Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau

Archive | 2007

Method for depositing tungsten-containing layers by vapor deposition techniques

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau

Archive | 2007

Pulsed deposition process for tungsten nucleation

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi

Archive | 2001

Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process

Jong Hyun Yoo; Xinliang Lu; Chiliang Chen; Ken Kaung Lai; Chien-teh Kao

Archive | 2001

Method and apparatus for forming nucleation layer by depositing refractory metal layer using sequential depositing technique

Jeong Soo Byun; Hua Chung; Moris Kori; Ken Kaung Lai; Chun-Rai Ray Lawrence; Karl A. Littau; Xinliang Lu; Alfred Mak; Shi Min; Ashok K. Sinha; シンハ アショック; ダブリュー マック アルフレッド; エイ リットー カール; カウン ライ ケン; スー ビュン ジェオン; ル シンリアン; チュン フア; シ ミン; コリ モーリス; チュン−ライ レイ ローレンス

Archive | 2002

Method for depositing metal layers employing sequential deposition techniques

Hongbin Fang; Hyung Suk A Yoon; Ken Kaung Lai; C C Young; James Horng; Ming Xi; Michael X. Yang; Hua Chung

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Ming Xi

Applied Materials

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Karl A. Littau

Applied Materials

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Ping Jian

Applied Materials

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Xinliang Lu

Applied Materials

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Alfred Mak

Applied Materials

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Hua Chung

Applied Materials

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Ashok K. Sinha

Applied Materials

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Bevan Vo

Applied Materials

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Bo Zheng

Applied Materials

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Chien-Teh Kao

Applied Materials

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