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Dive into the research topics where Xinliang Lu is active.

Publication


Featured researches published by Xinliang Lu.


Archive | 2002

Pulsed nucleation deposition of tungsten layers

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi


Archive | 2002

Formation of titanium nitride films using a cyclical deposition process

Hua Chung; Hongbin Fang; Ken Lai; Jeong Byun; Alfred Mak; Michael Yang; Ming Xi; Moris Kori; Xinliang Lu; Ping Jian


Archive | 2000

Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau


Archive | 2007

Method for depositing tungsten-containing layers by vapor deposition techniques

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau


Archive | 2007

Pulsed deposition process for tungsten nucleation

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi


Archive | 2001

Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process

Jong Hyun Yoo; Xinliang Lu; Chiliang Chen; Ken Kaung Lai; Chien-teh Kao


Archive | 2001

Method and apparatus for forming nucleation layer by depositing refractory metal layer using sequential depositing technique

Jeong Soo Byun; Hua Chung; Moris Kori; Ken Kaung Lai; Chun-Rai Ray Lawrence; Karl A. Littau; Xinliang Lu; Alfred Mak; Shi Min; Ashok K. Sinha; シンハ アショック; ダブリュー マック アルフレッド; エイ リットー カール; カウン ライ ケン; スー ビュン ジェオン; ル シンリアン; チュン フア; シ ミン; コリ モーリス; チュン−ライ レイ ローレンス


Archive | 2002

PROCESS FOR TUNGSTEN DEPOSITION BY PULSED GAS FLOW CVD

Jong Hyun Yoo; Xinliang Lu; Chiliang Chen; Ken K. Lai; Chien-teh Kao


Archive | 2003

Depot a nucleation pulsee de couches de tungstene

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi


Archive | 2002

Formation de films de nitrure de titane au moyen d'un processus de depot cyclique

Hua Chung; Hongbin Fang; Ken K. Lai; Jeong Soo Byun; Alfred Mak; Ming Xi; Moris Kori; Xinliang Lu; Ping Jian

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