Xinliang Lu | Researchain

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Featured researches published by Xinliang Lu.

Archive | 2002

Pulsed nucleation deposition of tungsten layers

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi

Archive | 2002

Formation of titanium nitride films using a cyclical deposition process

Hua Chung; Hongbin Fang; Ken Lai; Jeong Byun; Alfred Mak; Michael Yang; Ming Xi; Moris Kori; Xinliang Lu; Ping Jian

Archive | 2000

Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau

Archive | 2007

Method for depositing tungsten-containing layers by vapor deposition techniques

Ming Xi; Ashok K. Sinha; Moris Kori; Alfred Mak; Xinliang Lu; Ken Kaung Lai; Karl A. Littau

Archive | 2007

Pulsed deposition process for tungsten nucleation

Xinliang Lu; Ping Jian; Jong Hyun Yoo; Ken Kaung Lai; Alfred Mak; Robert L. Jackson; Ming Xi

Archive | 2001

Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process

Jong Hyun Yoo; Xinliang Lu; Chiliang Chen; Ken Kaung Lai; Chien-teh Kao

Archive | 2001

Method and apparatus for forming nucleation layer by depositing refractory metal layer using sequential depositing technique

Jeong Soo Byun; Hua Chung; Moris Kori; Ken Kaung Lai; Chun-Rai Ray Lawrence; Karl A. Littau; Xinliang Lu; Alfred Mak; Shi Min; Ashok K. Sinha; シンハアショック; ダブリューマックアルフレッド; エイリットーカール; カウンライケン; スービュンジェオン; ルシンリアン; チュンフア; シミン; コリモーリス; チュン−ライレイローレンス

Archive | 2002