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Ming Xi

Applied Materials

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Publication

Featured researches published by Ming Xi.

Archive | 2001

Chamber hardware design for titanium nitride atomic layer deposition

Anh N. Nguyen; Steve H. Chiao; Xiaoxiong Yuan; Lawrence Lei; Ming Xi; Michael Yang; Sean M. Seutter; Toshio Itoh

Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen

Archive | 2001

Valve control system for atomic layer deposition chamber

Siqing Lu; Yu Chang; Dongxi Sun; Vinh Dang; Michael X. Yang; Anzhong Andrew Chang; Anh N. Nguyen; Ming Xi

Archive | 2001

Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films

Anh N. Nguyen; Michael Yang; Ming Xi; Hua Chung; Anzhong Chang; Xiaoxiong Yuan; Siqing Lu

Archive | 2006

INTEGRATION PROCESS OF TUNGSTEN ATOMIC LAYER DEPOSITION FOR METALLIZATION APPLICATION

Ling Chen; Hua Chung; Sean M. Seutter; Michael Yang; Ming Xi; Vincent Ku; Dien-Yeh Wu; Alan Ouye; Norman Nakashima; Barry Chin; Hong Zhang

Archive | 1999

METHOD FOR PERFORMING METALLO-ORGANIC CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AT REDUCED TEMPERATURE

Shulin Wang; Huan Luo; Keith K. Koai; Ming Xi; Mei Chang; Russell C. Ellwanger

Archive | 2000

Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition

Vincent Ku; Ming Xi; Xiaoxiong Yuan; Anzhong Chang; Anh N. Nguyen

Archive | 2007

METHOD AND SYSTEM FOR CHEMICALLY ENHANCED LASER TRIMMING OF SUBSTRATE EDGES

Tetsuya Ishikawa; Tsuyoshi Mitsuhashi; Ming Xi

Archive | 2002

Mocvd method for tungsten deposition

Sean M. Seutter; Seshadri Ganguli; Mei Chang; Michael X. Yang; Ming Xi

Archive | 2002

Systeme de commande de soupapes pour chambre de depot en couches atomiques

Siqing Lu; Yu Chang; Dongxi Sun; Vinh Dang; Michael X. Yang; Anzhong Andrew Chang; Anh N. Nguyen; Ming Xi

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Collaboration

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Anh N. Nguyen

Applied Materials

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Michael X. Yang

Applied Materials

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Xiaoxiong Yuan

Applied Materials

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Anzhong Chang

Applied Materials

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Hua Chung

Applied Materials

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Mei Chang

Applied Materials

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Michael Yang

Applied Materials

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Russell C. Ellwanger

Applied Materials

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Sean M. Seutter

Applied Materials

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Steve H. Chiao

Applied Materials

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