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Ian Robert Harvey

VLSI Technology

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Publication

Featured researches published by Ian Robert Harvey.

Archive | 1997

Polymer adhesive plasma confinement ring

David E. Henderson; Ian Robert Harvey

Archive | 1998

System for dislodging by-product agglomerations from a polishing pad of a chemical mechanical polishing machine

Charles Franklin Drill; Ian Robert Harvey

Archive | 1997

Metallization technique for gate electrodes and local interconnects

Ian Robert Harvey; Xi-Wei Lin

Archive | 2000

Oxide etch stop techniques for uniform damascene trench depth

Ian Robert Harvey

Archive | 1999

Method for fabrication of a semiconductor device

Xi-Wei Lin; Henry Lee; Ian Robert Harvey

Archive | 1998

Custom laser conductor linkage for integrated circuits

Ian Robert Harvey

Archive | 1997

Plasma ash for silicon surface preparation

Ian Robert Harvey; Xi-Wei Lin; Ramiro Solis

Archive | 1997

Method for achieving accurate SOG etchback selectivity

Ian Robert Harvey; Calvin T. Gabriel

Archive | 1997

Silicon-enriched shallow trench oxide for reduced recess during LDD spacer etch

Ian Robert Harvey; Calvin T. Gabriel; Milind Weling

Archive | 1999

Method of making a custom laser conductor linkage for the integrated circuits

Ian Robert Harvey

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Collaboration

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Calvin T. Gabriel

VLSI Technology

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Xi-Wei Lin

VLSI Technology

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Linda Leard

VLSI Technology

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Charles Franklin Drill

VLSI Technology

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David E. Henderson

VLSI Technology

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Henry Lee

VLSI Technology

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Milind Weling

VLSI Technology

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Ramiro Solis

VLSI Technology

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Satyendra Sethi

VLSI Technology

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Subhas Bothra

VLSI Technology

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