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Iii Charles William Koburger

IBM

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Publication

Featured researches published by Iii Charles William Koburger.

Archive | 1982

Method for fabricating self-passivated composite silicon-silicide conductive electrodes

Henry John Geipel; Ning Hsieh; Iii Charles William Koburger; Larry Alan Nesbit

Archive | 1990

Forming wide dielectric filled isolation trenches in semiconductors

Michael L. Kerbaugh; Iii Charles William Koburger; Brian John Machesney

Archive | 2005

IMPLANTATION OF GATE REGIONS IN SEMICONDUCTOR DEVICE FABRICATION

Toshiharu Furukawa; Mark C. Hakey; Steven J. Holmes; David V. Horak; Iii Charles William Koburger

Archive | 2005

Integrated circuit dielectric having oriented cylindrical voids

Toshiharu Furukawa; Mark C. Hakey; Steven J. Holmes; David Vaclav Horak; Iii Charles William Koburger; Peter H. Mitchell

Archive | 1986

Vertically isolated complementary transistor structures

John Robert Abernathey; Iii Charles William Koburger

Archive | 2006

Y-shaped carbon nanotubes as afm probe for analyzing substrates with angled topography, method for their manufacture, method for performing atomic force microscopy and method for selectively modifying the surface of a substrate using said y-shaped nanotubes

Carol Boye; Toshiharu Furukawa; Mark C. Hakey; Steven J. Holmes; David Vaclav Horak; Iii Charles William Koburger

Archive | 2006

METHOD FOR FORMING A REMOVABLE EDGE EXTENSION ELEMENT

Iii Charles William Koburger; Steven J. Holmes; David V. Horak; Kurt R. Kimmel; Karen Petrillo; Christopher F. Robinson

Archive | 2006

Y-förmige kohlenstoffnanoröhrchen als afm-sonde zur analyse von substraten mit gewinkelter topographie, verfahren zur deren herstellung, verfahren zur durchfürung von rasterkraftmikroskopie und zur selektiven modifizierung der oberfläche eines substrates, das die y-förmigen kohlenstoffnanoröhrchen verwenden

Carol Boye; Toshiharu Furukawa; Mark C. Hakey; Steven J. Holmes; David Vaclav Horak; Iii Charles William Koburger

Archive | 2006

Y-förmige kohlenstoffnanoröhrchen als afm-sonde zur analyse von substraten mit gewinkelter topographie

Carol Boye; Toshiharu Furukawa; Mark C. Hakey; Steven J. Holmes; David Vaclav Horak; Iii Charles William Koburger

Archive | 2005

Verfahren zur herstellung verspannter silizium-auf-isolator-strukturen und dadurch gebildete verspannte silizium-auf-isolator-strukturen

Toshiharu Furukawa; Iii Charles William Koburger; James A. Slinkman

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Toshiharu Furukawa

IBM

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Mark C. Hakey

IBM

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Steven J. Holmes

IBM

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David Vaclav Horak

IBM

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Carol Boye

IBM

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Michael L. Kerbaugh

IBM

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David V. Horak

IBM

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Henry John Geipel

IBM

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James A. Slinkman

IBM

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John Robert Abernathey

IBM

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