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Dive into the research topics where Jan Raebiger is active.

Publication


Featured researches published by Jan Raebiger.


Archive | 2002

Method and system for controlling an electrical property of a field effect transistor

Jan Raebiger; Andre Holfeld; Dirk Wollstein


Archive | 1998

Method of controlling effective channel length of semiconductor device by non-doping implantation at elevated energies

David Greenlaw; Jan Raebiger


Archive | 2002

Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step

Dirk Wollstein; Jan Raebiger; Gerd Marxsen


Archive | 2005

Method and system for controlling a product parameter of a circuit element

Andre Holfeld; Jan Raebiger; Lutz Herrmann


Archive | 2004

Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer

Jan Raebiger; Andre Holfeld


Archive | 2003

Method and system for improving exposure uniformity in a step and repeat process

Jan Raebiger; Heiko Wagner; Uwe Schulze; Rolf Seltmann


Archive | 2003

Method and system for improving the efficiency of a mechanical alignment tool

Uwe Knappe; Jan Raebiger; Uwe Schulze; Rolf Seltmann


Archive | 2002

Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events

Gunter Grasshoff; Jan Raebiger; Andre Holfeld


Archive | 2005

Method of operating an advanced process controller by dynamically adapting hierarchy levels

Heiko Wagner; Jan Raebiger


Archive | 2004

Verfahren und System zum Verbessern der Effizienz einer mechanischen Justieranlage

Uwe Knappe; Jan Raebiger; Uwe Schulze; Rolf Seltmann

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