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Jeffrey W. Anthis

Applied Materials

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Publication

Featured researches published by Jeffrey W. Anthis.

Archive | 2014

Methods Of Etching Films Comprising Transition Metals

Jeffrey W. Anthis; Benjamin Schmiege; David Thompson

Archive | 2014

Selective etch for metal-containing materials

Nitin K. Ingle; Jessica Kachian; Lin Xu; Soonam Park; Xikun Wang; Jeffrey W. Anthis

Archive | 2013

Methods And Apparatus For Forming Tantalum Silicate Layers On Germanium Or III-V Semiconductor Devices

Jeffrey W. Anthis; Khaled Ahmed

Archive | 2014

Plasma-free metal etch

Nitin K. Ingle; Jessica Kachian; Lin Xu; Soonam Park; Xikun Wang; Jeffrey W. Anthis

Archive | 2012

Deposition of metal films using alane-based precursors

Xinliang Lu; David Thompson; Jeffrey W. Anthis; Mei Chang; Seshadri Ganguli; Wei Tang; Srinivas Gandikota; Atif Noori

Archive | 2014

Methods of depositing a metal alloy film

David Thompson; Jeffrey W. Anthis

Archive | 2012

Activated Silicon Precursors For Low Temperature Deposition

Timothy W. Weidman; Todd Schroeder; David Thompson; Jeffrey W. Anthis

Archive | 2014

Oxide and metal removal

Xikun Wang; Jie Liu; Anchuan Wang; Nitin K. Ingle; Jeffrey W. Anthis; Benjamin Schmiege

Archive | 2014

Cobalt removal for chamber clean or pre-clean process

Kai Wu; Bo Zheng; Sang Ho Yu; Avgerinos V. Gelatos; Bhushan N. Zope; Jeffrey W. Anthis; Benjamin Schmiege

Archive | 2012

Precursors and Methods for the Atomic Layer Deposition of Manganese

David Thompson; Jeffrey W. Anthis

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David Thompson

Applied Materials

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Mei Chang

Applied Materials

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Benjamin Schmiege

Applied Materials

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David Knapp

Applied Materials

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David R. Thompson

California Institute of Technology

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Srinivas Gandikota

Applied Materials

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Atif Noori

University of California

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Nitin K. Ingle

Applied Materials

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Seshadri Ganguli

Applied Materials

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Wei Tang

Applied Materials

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