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Jerome S. Hubacek

Lam Research

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Publication

Featured researches published by Jerome S. Hubacek.

Archive | 1999

Electrode for plasma processes and method for manufacture and use thereof

John Lilleland; Jerome S. Hubacek; William S. Kennedy

Archive | 2002

GAS DISTRIBUTION APPARATUS FOR SEMICONDUCTOR PROCESSING

Jerome S. Hubacek

Archive | 2001

Electrostatically clamped edge ring for plasma processing

Jerome S. Hubacek

Archive | 1999

Semiconductor processing equipment having tiled ceramic liner

William S. Kennedy; Robert A. Maraschin; Jerome S. Hubacek

Archive | 2001

Method of manufacturing assembly for plasma reaction chamber and use thereof

John Lilleland; Jerome S. Hubacek; William S. Kennedy

Archive | 2004

Silicon parts having reduced metallic impurity concentration for plasma reaction chambers

Daxing Ren; Jerome S. Hubacek; Nicholas E. Webb

Archive | 2005

Methods for silicon electrode assembly etch rate and etch uniformity recovery

Tuochuan Huang; Daxing Ren; Hong Shih; Catherine Zhou; Chun Yan; Enrico Magni; Bi Ming Yen; Jerome S. Hubacek; Dae J. Lim; Dougyong Sung

Archive | 1999

Elastomer bonded parts for plasma processes and method for manufacture and use thereof

John Lilleland; Jerome S. Hubacek; William S. Kennedy; Robert A. Maraschin

Archive | 2002

Elastomeric bonding material for plasma treatment and method of manufacture and use thereof

Jerome S. Hubacek; William S. Kennedy; John Lilleland; Robert A. Maraschin; ウィリアム エス． ケネディー，; ジェロム エス． ヒューバセク，; ロバート， エー． マラシュチン，; ジョン リルランド

Archive | 1999

A method of replacing an electrode assembly for plasma processes

John Lilleland; Jerome S. Hubacek; William S. Kennedy

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William S. Kennedy

Lam Research

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John Lilleland

Lam Research

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Daxing Ren

Lam Research

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Robert A. Maraschin

Lam Research

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Nicholas E. Webb

Lam Research

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Bi Ming Yen

Lam Research

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Catherine Zhou

Lam Research

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Chun Yan

Lam Research

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Dae J. Lim

Lam Research

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Dougyong Sung

Lam Research

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