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Robert A. Maraschin

Lam Research

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Publication

Featured researches published by Robert A. Maraschin.

Archive | 2002

Low contamination high density plasma etch chambers and methods for making the same

Thomas E. Wicker; Robert A. Maraschin; William S. Kennedy

Archive | 1996

Temperature controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Joel M. Cook; Robert A. Maraschin; William S. Kennedy; Neil Benjamin

Archive | 2000

Semiconductor processing equipment having radiant heated ceramic liner

William S. Kennedy; Robert A. Maraschin; Thomas E. Wicker

Archive | 1996

Particle controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Robert A. Maraschin

Archive | 1999

Semiconductor processing equipment having tiled ceramic liner

William S. Kennedy; Robert A. Maraschin; Jerome S. Hubacek

Archive | 1990

Method and system for delivering liquid reagents to processing vessels

Alan D. Nolet; Lloyd F. Wright; Robert A. Maraschin

Archive | 2001

Load controlled rapid assembly clamp ring

Robert A. Maraschin

Archive | 1995

Electrostatic clamp with lip seal for clamping substrates

Robert A. Maraschin; Paul Kevin Shufflebotham; Michael Barnes

Archive | 1999

Contamination controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Alan M. Schoepp; Robert A. Maraschin

Archive | 1999

Contamination controlling method and plasma processing chamber

Alan M. Schoepp; Thomas E. Wicker; Robert A. Maraschin

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Thomas E. Wicker

Lam Research

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William S. Kennedy

Lam Research

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Jerome S. Hubacek

Lam Research

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Yezdi Dordi

Lam Research

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Alan M. Schoepp

Lam Research

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Carl Woods

Lam Research

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John M. Boyd

Lam Research

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Albert J. Lamm

Lam Research

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Fred C. Redeker

Lam Research

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Joel M. Cook

Lam Research

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