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Joerg Hohage

GlobalFoundries

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Publication

Featured researches published by Joerg Hohage.

Archive | 2003

Barrier layer for a copper metallization layer including a low k dielectric

Hartmut Ruelke; Joerg Hohage; Thomas Werner; Massud Aminpur

Archive | 2003

Nitrogen-enriched low-k barrier layer for a copper metallization layer

Hartmut Ruelke; Joerg Hohage; Thomas Werner; Michael Kiene

Archive | 2003

Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric

Hartmut Ruelke; Joerg Hohage; Thomas Werner; Frank Mauersberger

Archive | 2002

Method of removing oxidized portions at an interface of a metal surface and capping layer in a semiconductor metallization layer

Hartmut Ruelke; Joerg Hohage; Minh Van Ngo; Paul L. King; Peter Huebler

Archive | 2010

NON-INSULATING STRESSED MATERIAL LAYERS IN A CONTACT LEVEL OF SEMICONDUCTOR DEVICES

Ralf Richter; Hartmut Ruelke; Joerg Hohage

Archive | 2002

Highly efficient remote clean process for process chambers in deposition tools

Christof Streck; Hartmut Ruelke; Joerg Hohage

Archive | 2009

Reduced wafer warpage in semiconductors by stress engineering in the metallization system

Matthias Lehr; Frank Koschinsky; Joerg Hohage

Archive | 2006

TECHNIQUE FOR FORMING A SILICON NITRIDE LAYER HAVING HIGH INTRINSIC COMPRESSIVE STRESS

Steffen Baer; Joerg Hohage; Volker Kahlert

Archive | 2014

Übertragung von kompressiver Verspannung in einem Zwischenschichtdielektrikum einer Halbleitervorrichtung durch Bereitstellen einer Zweischicht mit verbesserter Haftung und innerer Verspannung

Joerg Hohage; Hartmut Ruelke; Ralf Richter

Archive | 2014

COMPRESSIVE STRESS TRANSFER IN AN INTERLAYER DIELECTRIC OF A SEMICONDUCTOR DEVICE BY PROVIDING A BI-LAYER OF SUPERIOR ADHESION AND INTERNAL STRESS

Joerg Hohage; Hartmut Ruelke; Ralf Richter

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Hartmut Ruelke

GlobalFoundries

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Ralf Richter

GlobalFoundries

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Michael Finken

Advanced Micro Devices

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Thomas Werner

GlobalFoundries

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Kai Frohberg

Advanced Micro Devices

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Matthias Lehr

GlobalFoundries

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Massud Aminpur

GlobalFoundries

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Christof Streck

Advanced Micro Devices

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Minh Van Ngo

Advanced Micro Devices

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Frank Seliger

GlobalFoundries

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