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Dive into the research topics where Ralf Richter is active.

Publication


Featured researches published by Ralf Richter.


Archive | 2007

Method for reducing resist poisoning during patterning of silicon nitride layers in a semiconductor device

Kai Frohberg; Volker Grimm; Sven Mueller; Matthias Lehr; Ralf Richter; Jochen Klais; Martin Mazur; Heike Salz; Joerg Hohage; Matthias Schaller


Archive | 2007

METHOD FOR REDUCING RESIST POISONING DURING PATTERNING OF STRESSED NITROGEN-CONTAINING LAYERS IN A SEMICONDUCTOR DEVICE

Kai Frohberg; Ralf Richter; Thomas Werner


Archive | 2006

Technique for increasing adhesion of metallization layers by providing dummy vias

Ralf Richter; Matthias Schaller; Ellen Claus; Eckhard Langer


Archive | 2008

STRESS TRANSFER IN AN INTERLAYER DIELECTRIC BY PROVIDING A STRESSED DIELECTRIC LAYER ABOVE A STRESS-NEUTRAL DIELECTRIC MATERIAL IN A SEMICONDUCTOR DEVICE

Ralf Richter; Andy Wei; Manfred Horstmann; Joerg Hohage


Archive | 2006

SEMICONDUCTOR DEVICE COMPRISING A CONTACT STRUCTURE WITH INCREASED ETCH SELECTIVITY

Ralf Richter; Carsten Peters; Heike Salz; Matthias Schaller


Archive | 2008

METHOD OF FORMING A SEMICONDUCTOR STRUCTURE COMPRISING A FIELD EFFECT TRANSISTOR HAVING A STRESSED CHANNEL REGION

Ralf Richter; Joerg Hohage; Michael Finken; Jana Schlott


Archive | 2010

Interlayer dielectric material in a semiconductor device comprising stressed layers with an intermediate buffer material

Joerg Hohage; Michael Finken; Ralf Richter


Archive | 2010

TECHNIQUE FOR COMPENSATING FOR A DIFFERENCE IN DEPOSITION BEHAVIOR IN AN INTERLAYER DIELECTRIC MATERIAL

Ralf Richter; Robert Seidel; Carsten Peters


Archive | 2007

ENHANCED STRESS TRANSFER IN AN INTERLAYER DIELECTRIC BY USING AN ADDITIONAL STRESS LAYER ABOVE A DUAL STRESS LINER IN A SEMICONDUCTOR DEVICE

Ralf Richter; Martin Gerhardt; Martin Mazur; Joerg Hohage


Archive | 2006

Lacquer contamination reducing method, involves forming lacquer mask, which unseals area of deformation induced layer, over layer to cover one transistor, and removing unsealed area of layer from area over another transistor

Kai Frohberg; Volker Grimm; Joerg Hohage; Jochen Klais; Matthias Lehr; Martin Mazur; Sven Mueller; Ralf Richter; Heike Salz; Matthias Schaller

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Heike Salz

Advanced Micro Devices

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Robert Seidel

Helmholtz-Zentrum Berlin

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