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Matthias Lehr

Advanced Micro Devices

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Publication

Featured researches published by Matthias Lehr.

Archive | 2007

Method for reducing resist poisoning during patterning of silicon nitride layers in a semiconductor device

Kai Frohberg; Volker Grimm; Sven Mueller; Matthias Lehr; Ralf Richter; Jochen Klais; Martin Mazur; Heike Salz; Joerg Hohage; Matthias Schaller

Archive | 2006

Technique for forming a copper-based metallization layer including a conductive capping layer

Matthias Lehr; Frank Koschinsky; Markus Nopper

Archive | 2006

TECHNIQUE FOR FORMING CONTACT INSULATION LAYERS AND SILICIDE REGIONS WITH DIFFERENT CHARACTERISTICS

Christoph Schwan; Kai Frohberg; Matthias Lehr

Archive | 2005

Semiconductor substrate thinning method for manufacturing thinned die

Frank Seliger; Matthias Lehr; Marcel Wieland; Lothar Mergili; Frank Kuechenmeister

Archive | 2006

METHOD OF FORMING AN INSULATING CAPPING LAYER FOR A COPPER METALLIZATION LAYER

Joerg Hohage; Matthias Lehr; Volker Kahlert

Archive | 2006

Method of forming an insulating capping layer for a copper metallization layer by using a silane reaction

Joerg Hohage; Matthias Lehr; Volker Kahlert

Archive | 2011

A semiconductor device including a reduced stress configuration for metal pillars

Alexander Platz; Matthias Lehr; Frank Kuechenmeister

Archive | 2008

WIRE BONDING OF ALUMINUM-FREE METALLIZATION LAYERS BY SURFACE CONDITIONING

Matthias Lehr; Frank Kuechenmeister

Archive | 2007

A metallization layer stack without a terminal aluminum metal layer

Matthias Lehr; Frank Kuechenmeister; Lothar Lehmann; Marcel Wieland; Alexander Platz; Axel Walter; Gotthard Jungnickel

Archive | 2006

Method and semiconductor structure for monitoring the fabrication of interconnect structures and contacts in a semiconductor device

Matthias Lehr; Kai Frohberg; Holger Schuehrer

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Frank Kuechenmeister

Advanced Micro Devices

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Volker Kahlert

Advanced Micro Devices

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Joerg Hohage

Advanced Micro Devices

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Jörg Hohage

Advanced Micro Devices

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Kai Frohberg

Advanced Micro Devices

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Matthias Schaller

GlobalFoundries

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Christian Zistl

Advanced Micro Devices

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Peter Huebler

Advanced Micro Devices

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Alexander Platz

Advanced Micro Devices

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Holger Schuehrer

Advanced Micro Devices

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