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Dive into the research topics where Hartmut Ruelke is active.

Publication


Featured researches published by Hartmut Ruelke.


Archive | 2001

Method of forming capped copper interconnects with reduced hillock formation and improved electromigration resistance

Steven C. Avanzino; Minh Van Ngo; Amit P. Marathe; Hartmut Ruelke


Archive | 2002

Copper damascene with low-k capping layer and improved electromigration reliability

Minh Van Ngo; Jeremy I. Martin; Hartmut Ruelke


Archive | 2003

Low-k dielectric layer stack including an etch indicator layer for use in the dual damascene technique

Hartmut Ruelke; Christof Streck; Georg Sulzer


Archive | 2001

Methods of forming capped copper interconnects with improved electromigration resistance

Minh Van Ngo; Steven C. Avanzino; Amit P. Marathe; Hartmut Ruelke


Archive | 2000

Method of forming capped copper interconnects with reduced hillocks

Minh Van Ngo; Hartmut Ruelke; Joerg Hohage; Lothar Mergili


Archive | 2001

Method of forming copper interconnect capping layers with improved interface and adhesion

Minh Van Ngo; Hartmut Ruelke; Lothar Mergili; Joerg Hohage; Lu You; Robert A. Huertas; Richard J. Huang


Archive | 2000

Method Of Forming Silicon Oxynitride Films

Sey-Ping Sun; Homi E. Nariman; Hartmut Ruelke


Archive | 2006

Eine Technik zur Herstellung einer dielektrischen Zwischenschicht über einer Struktur mit eng beabstandeten Leitungen

Hartmut Ruelke; Christof Streck; Kai Frohberg


Archive | 2005

Method of forming a field effect transistor having a stressed channel region

Joerg Hohage; Hartmut Ruelke; Kai Frohberg


Archive | 2005

Method of forming a field effect transistor comprising a stressed channel region

Joerg Hohage; Hartmut Ruelke; Kai Frohberg

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Katja Huy

Advanced Micro Devices

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