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John F. Cameron

Applied Materials

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Publication

Featured researches published by John F. Cameron.

Archive | 1994

Electrostatic chuck for magnetic flux processing

Shamouil Shamouilian; John F. Cameron; Chandra Deshpandey; Yuh-Jia Su

Archive | 1998

Electrostatic chuck with improved erosion resistance

Shamouil Shamouilian; Manoocher Birang; John F. Cameron; Chandra Deshpandey; Alfred Goldspeil; Ron Northrup; Semyon Shertinsky; Sasson Somekh

Archive | 1995

ELECTROSTATIC CHUCK WITH CONFORMAL INSULATOR FILM

Shamouil Shamouilian; Sasson Somekh; Hyman J. Levinstein; Manoocher Birang; Semyon Sherstinsky; John F. Cameron

Archive | 1996

Method of forming an electrostatic chuck suitable for magnetic flux processing

Shamouil Shamouilian; John F. Cameron; Chandra Deshpandey; Yuh-Jia Su

Archive | 1995

Erosion resistant electrostatic chuck with improved cooling system

John F. Cameron; Joseph F. Salfelder; Chandra Deshpandey

Archive | 1995

Barrier seal for electrostatic chuck

Joseph F. Salfelder; Dennis S. Grimard; John F. Cameron; Chandra Deshpandey; Robert E. Ryan; Michael G. Chafin

Archive | 1995

Electrostatic chuck with fluid flow regulator

Semyon Sherstinsky; John F. Cameron; Shamouil Shamouilian; Manoocher Birang; Alfred Mak; Simon W. Tam; Robert E. Ryan

Archive | 1996

Method of making electrostatic chuck with conformal insulator film

Shamouil Shamouilian; Sasson Somekh; Hyman J. Levinstein; Manoocher Birang; Semyon Sherstinsky; John F. Cameron

Archive | 1998

Method of fabricating an electrostatic chuck

Shamouil Shamouilian; Manoocher Birang; John F. Cameron; Chandra Deshpandey; Alfred Goldspeil; Ron Northrup; Semyon Sherstinsky; Sasson Someth

Archive | 1995

Electrostatic chuck for a substrate in a process chamber

Shamouil Shamouilian; John F. Cameron

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Chandra Deshpandey

Applied Materials

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Manoocher Birang

Applied Materials

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Semyon Sherstinsky

Applied Materials

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Sasson Somekh

Applied Materials

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Shamouil Shamouilian

Applied Materials

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Ron Northrup

Applied Materials

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Shamouil Shamouillian

Applied Materials

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Alan Goldspiel

Applied Materials

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Joseph F. Salfelder

Applied Materials

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Robert E. Ryan

Applied Materials

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