Nobuyuki Okayama | Researchain

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Featured researches published by Nobuyuki Okayama.

Archive | 2004

Focus ring and plasma processing apparatus

Akira Koshiishi; Hideaki Tanaka; Nobuyuki Okayama; Masaaki Miyagawa; Shunsuke Mizukami; Wataru Shimizu; Jun Hirose; Toshikatsu Wakaki; Tomonori Miwa; Jun Ooyabu; Daisuke Hayashi

Archive | 2002

Substrate table, production method therefor and plasma treating device

Shinji Muto; Chihiro Taguchi; Nobuyuki Okayama

Archive | 2007

Table for supporting substrate, and vacuum-processing equipment

Nobuyuki Okayama

Archive | 2006

Mounting stand and vacuum processor

Nobuyuki Okayama; 信幸岡山

Archive | 2002

Holding apparatus, method of manufacturing same, and plasma processing apparatus

Shinji Muto; Nobuyuki Okayama; Chihiro Taguchi; 信幸岡山; 慎司武藤; 千博田口

Archive | 2006

SUBSTRATE MOUNT TABLE AND PLASMA TREATMENT APPARATUS

Masayuki Nagayama; Nobuyuki Okayama; Hideki Sugiyama; 信幸岡山; 秀樹杉山; 将之長山

Archive | 2002

Method of processing quartz member for plasma processing device, quartz member for plasma processing device, and plasma processing device having quartz member for plasma processing device mounted thereon

Norikazu Sugiyama; Hidehito Saegusa; Nobuyuki Okayama; Shunichi Iimuro; Kosuke Imafuku; Nobuyuki Nagayama; Kouji Mitsuhashi; Hiroyuki Nakayama; Yahui Huang

Archive | 1998