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Junzou Azuma

Hitachi

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Publication

Featured researches published by Junzou Azuma.

Archive | 1990

Processing apparatus and method for plasma processing

Mitsuo Tokuda; Junzou Azuma; Toru Otsubo; Yasuhiro Yamaguchi; Ichirou Sasaki

Archive | 1996

Process method and apparatus using focused ion beam generating means

Michinobu Mizumura; Yuuichi Hamamura; Junzou Azuma; Akira Shimase; Takashi Kamimura; Fumikazu Itoh; Kaoru Umemura; Yoshimi Kawanami; Yuuichi Madokoro

Archive | 1994

Processing method and apparatus using focused energy beam

Junzou Azuma; Fumikazu Itoh; Satoshi Haraichi; Akira Shimase; Junichi Mori; Takahiko Takahashi; Emiko Uda

Archive | 1998

Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam

Yuichi Hamamura; Akira Shimase; Junzou Azuma; Michinobu Mizumura; Norimasa Nishimura; Yasuhiro Koizumi; Hidemi Koike

Archive | 1992

Phase shift mask, method of correcting the same and apparatus for carrying out the method

Satoshi Haraichi; Fumikazu Itoh; Akira Shimase; Hiroshi Yamaguchi; Junzou Azuma; Yasuhiro Koizumi

Archive | 1998

Visual inspection method and apparatus therefor

Yukio Matsuyama; Yuji Takagi; Takashi Hiroi; Maki Tanaka; Asahiro Kuni; Junzou Azuma; Shunji Maeda; Chie Shishido

Archive | 1997

Pattern forming method using charged particle beam process and charged particle beam processing system

Junzou Azuma; Akira Shimase; Yuichi Hamamura; Hidemi Koike

Archive | 1997

Method and system for judging milling end point for use in charged particle beam milling system

Akira Shimase; Yuichi Hamamura; Junzou Azuma; Michinobu Mizumura

Archive | 1991

Ion beam processing method and apparatus

Fumikazu Itoh; Akira Shimase; Satoshi Haraichi; Junzou Azuma

Archive | 1993

Apparatus for processing a sample using a charged beam and reactive gases

Yuuichi Hamamura; Satoshi Haraichi; Akira Shimase; Junzou Azuma; Fumikazu Itoh; Toshio Yamada; Yasuhiro Koizumi; Michinobu Mizumura

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Akira Shimase

Hitachi

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Fumikazu Itoh

Hitachi

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Satoshi Haraichi

Hitachi

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Michinobu Mizumura

Hitachi

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Yasuhiro Koizumi

Hitachi

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Yuichi Hamamura

Hitachi

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Hidemi Koike

Hitachi

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Norimasa Nishimura

Hitachi

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Yuuichi Hamamura

Hitachi

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Asahiro Kuni

Hitachi

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