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Dive into the research topics where Michinobu Mizumura is active.

Publication


Featured researches published by Michinobu Mizumura.


Archive | 1996

Process method and apparatus using focused ion beam generating means

Michinobu Mizumura; Yuuichi Hamamura; Junzou Azuma; Akira Shimase; Takashi Kamimura; Fumikazu Itoh; Kaoru Umemura; Yoshimi Kawanami; Yuuichi Madokoro


Archive | 1998

Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam

Yuichi Hamamura; Akira Shimase; Junzou Azuma; Michinobu Mizumura; Norimasa Nishimura; Yasuhiro Koizumi; Hidemi Koike


Archive | 1997

Method and system for judging milling end point for use in charged particle beam milling system

Akira Shimase; Yuichi Hamamura; Junzou Azuma; Michinobu Mizumura


Archive | 1994

PROCESSING METHOD AND DEVICE USING FOCUSED ION BEAM GENERATING MEANS

Junzo Azuma; Yuichi Hamamura; Fumikazu Ito; Takashi Kamimura; Yoshimi Kawanami; Yuichi Madokoro; Michinobu Mizumura; Akira Shimase; Kaoru Umemura; 隆 上村; 文和 伊藤; 朗 嶋瀬; 義実 川浪; 淳三 東; 馨 梅村; 通伸 水村; 有一 濱村; 祐一 間所


Archive | 1993

Apparatus for processing a sample using a charged beam and reactive gases

Yuuichi Hamamura; Satoshi Haraichi; Akira Shimase; Junzou Azuma; Fumikazu Itoh; Toshio Yamada; Yasuhiro Koizumi; Michinobu Mizumura


Archive | 1999

Method and apparatus for observing or processing and analyzing using a charged beam

Norimasa Nishimura; Akira Shimase; Junzou Azuma; Yuichi Hamamura; Michinobu Mizumura; Yasuhiro Koizumi; Hidemi Koike


Archive | 2004

Etching method of organic insulating film

Michinobu Mizumura; Ryooji Fukuyama; Yutaka Ohmoto; Katsuya Watanabe


Archive | 1999

Device and method for treating charge beam and failure analysis method of semiconductor and/or in-vacuum evaluation device of sample

Junzo Azuma; Yuichi Hamamura; Hidemi Koike; Michinobu Mizumura; Norimasa Nishimura; Akira Shimase; Yasuo Sonobe; 泰夫 園部; 英巳 小池; 朗 嶋瀬; 淳三 東; 通伸 水村; 有一 濱村; 規正 西村


Archive | 1994

Plasma treating method and device

Katsuhiro Iwashita; Michinobu Mizumura; Toru Otsubo; 徹 大坪; 克博 岩下; 通伸 水村


Archive | 2011

Scanning exposure apparatus using microlens array

Michinobu Mizumura; Makoto Hatanaka

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