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Kai Frohberg

Advanced Micro Devices

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Publication

Featured researches published by Kai Frohberg.

Archive | 2005

Technique for creating different mechanical stress in different channel regions by forming an etch stop layer having differently modified intrinsic stress

Kai Frohberg; Matthias Schaller; Massud Aminpur

Archive | 2009

MICROSTRUCTURE DEVICE INCLUDING A METALLIZATION STRUCTURE WITH SELF-ALIGNED AIR GAPS BETWEEN CLOSELY SPACED METAL LINES

Frank Feustel; Thomas Werner; Kai Frohberg

Archive | 2008

Method of creating a strained channel region in a transistor by deep implantation of strain-inducing species below the channel region

Uwe Griebenow; Kai Frohberg; Christoph Schwan; Kerstin Ruttloff

Archive | 2005

Technique for forming a passivation layer prior to depositing a barrier layer in a copper metallization layer

Holger Schuehrer; Carsten Hartig; Christin Bartsch; Kai Frohberg

Archive | 2005

Technique for controlling mechanical stress in a channel region by spacer removal

Kai Frohberg; Matthias Schaller; Massud Aminpur; Martin Mazur; Roberto Klingler

Archive | 2007

Method for reducing resist poisoning during patterning of silicon nitride layers in a semiconductor device

Kai Frohberg; Volker Grimm; Sven Mueller; Matthias Lehr; Ralf Richter; Jochen Klais; Martin Mazur; Heike Salz; Joerg Hohage; Matthias Schaller

Archive | 2006

TECHNIQUE FOR FORMING CONTACT INSULATION LAYERS AND SILICIDE REGIONS WITH DIFFERENT CHARACTERISTICS

Christoph Schwan; Kai Frohberg; Matthias Lehr

Archive | 2008

Hybrid contact structure with low aspect ratio contacts in a semiconductor device

Frank Feustel; Kai Frohberg; Thomas Werner

Archive | 2007

METHOD FOR REDUCING RESIST POISONING DURING PATTERNING OF STRESSED NITROGEN-CONTAINING LAYERS IN A SEMICONDUCTOR DEVICE

Kai Frohberg; Ralf Richter; Thomas Werner

Archive | 2005

Technique for enhancing the fill capabilities in an electrochemical deposition process by edge rounding of trenches

Kai Frohberg; Matthias Schaller; Massud Aminpur

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Collaboration

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Frank Feustel

Advanced Micro Devices

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Thomas Werner

GlobalFoundries

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Thomas Werner

GlobalFoundries

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Uwe Griebenow

Advanced Micro Devices

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Matthias Schaller

GlobalFoundries

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Carsten Peters

Advanced Micro Devices

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Katrin Reiche

Advanced Micro Devices

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Ralf Richter

GlobalFoundries

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Kerstin Ruttloff

Advanced Micro Devices

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Heike Berthold

Advanced Micro Devices

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