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Dive into the research topics where Katrin Reiche is active.

Publication


Featured researches published by Katrin Reiche.


Archive | 2011

Semiconductor device comprising contact elements with silicided sidewall regions

Jens Heinrich; Kai Frohberg; Katrin Reiche


Archive | 2011

Selective shrinkage of contact elements in a semiconductor device

Kai Frohberg; Ralf Richter; Torsten Huisinga; Katrin Reiche


Archive | 2014

SEMICONDUCTOR DEVICE COMPRISING CONTACT STRUCTURES WITH PROTECTION LAYERS FORMED ON SIDEWALLS OF CONTACT ETCH STOP LAYERS

Kai Frohberg; Marco Lepper; Katrin Reiche; Torsten Huisinga


Archive | 2011

METHODS OF FORMING CONDUCTIVE CONTACTS WITH REDUCED DIMENSIONS

Kai Frohberg; Dominik Olligs; Daniel Prochnow; Katrin Reiche


Archive | 2010

Stress Reduction in Chip Packaging by a Stress Compensation Region Formed Around the Chip

Dmytro Chumakov; Michael Grillberger; Heike Berthold; Katrin Reiche


Archive | 2012

Methods of fabricating integrated circuits with the elimination of voids in interlayer dielectics

Kai Frohberg; Torsten Huisinga; Katrin Reiche


Archive | 2010

Method for adjusting the height of a gate electrode in a semiconductor device

Kai Frohberg; Heike Berthold; Katrin Reiche; Uwe Griebenow


Archive | 2011

Buried Sublevel Metallizations for Improved Transistor Density

Kai Frohberg; Dominik Olligs; Jens Heinrich; Katrin Reiche


Archive | 2014

Methods for forming protection layers on sidewalls of contact etch stop layers

Kai Frohberg; Marco Lepper; Katrin Reiche


Archive | 2012

Halbleiterbauelement mit Kontaktelementen mit silizidierten Seitenwandgebieten

Jens Heinrich; Kai Frohberg; Katrin Reiche

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