Karen Maex | Researchain

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Featured researches published by Karen Maex.

Archive | 1995

Properties of metal silicides

Karen Maex; Marc Van Rossum; Inspec

Archive | 1998

Applicability of HF solutions for contact hole cleaning on top of TiSi2

Mikhail Baklanov; Eiichi Kondoh; Serge Vanhaelemeersch; Karen Maex

Archive | 1996

Etching process of CoSi2 layers and process for the fabrication of Schottky-barrier detectors using the same

Mikhail R. Baklanov; Ludo Deferm; R. A Donaton; Philippe Jansen; Karen Maex; Rita Rooyackers; Rita Verbeeck

Archive | 1999

Thermal desorption issues related to silicidation and back-end metallization

Hua Li; Guy Vereecke; Marc Schaekers; Mikhail Baklanov; Erik Sleeckx; Karen Maex; Ludo Froyen

Proc. MRS 1997 Fall Meeting, Materials Research Society Symposium (Oct.-Nov. 1997) | 1998

A new approach for the measurement of resistivity and cross-sectional area of a aluminium interconnect line: principle and applications

Hai Wen Li; S Jin; Joris Proost; M. Van Hove; Ludo Froyen; Karen Maex

Conference Proceedigs ULSI XIII | 1998

New sensitive electrical measurement techniques for the study of stress induced voiding

Ann Witvrouw; Christel Drijbooms; Hugo Bender; Karen Maex

Archive | 1996

Protective films formed by RIE of Co and Ti silicides and ways of their removal

Mikhail R. Baklanov; Serge Vanhaelemeersch; Young-Chang Kim; Wolfgang Storm; Wilfried Vandervorst; Karen Maex

Archive | 2001

The influence of TiN on the thermal stability of CoSi2

Christophe Detavernier; Gerlinde Ruttens; R.L. Van Meirhaeghe; Karen Maex

Archive | 1999

A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics

Filip Lanckmans; Luc Geenen; Wilfried Vandervorst; Karen Maex

Archive | 1999

2936 Thermal stability and relaxation in diamond-like-carbon. A Raman study of films with different sp 3 fractions Ñta-C to a-CÖ

Nora Koch; Alexander Pogantsch; Emil J. W. List; Guenther Leising; R.I.R. Blyth; M.G. Ramsey; F.P. Netzer; L. K. Ang; Y. Y. Lau; Ronald M. Gilgenbach; Johann Peter Reithmaier; A. Forchel; M. Fehndrich; Ana Josef; Lon A. Wilkens; Norbert Bahlmann; Michael Lohmeyer; Philipp Hertel; Ilko K. Ilev; Ronald W. Waynant; Francois Kajzar; Stanislaw Bartkiewicz; Andrzej Miniewicz; A. de Graaf; Maikel F. A. M. van Hest; M.C.M. van de Sanden; K. G. Y. Letourneur; Daniel C. Schram; Christophe Detavernier; Roland L. Van Meirhaeghe

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